Flow Rate Measuring System Inspection for Substrate Processing
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Solution Overview
Problem
The existing flow rate measuring systems in substrate processing systems face inaccuracies due to temperature variations in the gas flow paths, which affect the calculation of gas flow rates, especially when using the build-up method, leading to potential inaccuracies in substrate processing results.
Innovation Solution
A method is introduced to inspect the flow rate measuring system by comparing initial and calculation values of the gas flow path volumes and pressures, using multiple sensors to account for temperature changes and sensor deviations, ensuring the system is in a suitable state for accurate flow rate measurement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the build-up method is used to measure gas flow rate based on pressure increase rate, then flow rate measurement is achieved, but measurement precision deteriorates due to temperature variations in the gas flow path
Solution Approach 1:
The patent applies preliminary action by measuring the temperature of the gas flow path in advance before conducting the flow rate measurement. This temperature measurement is used to calculate a correction factor that compensates for temperature variations during the subsequent pressure-based flow rate measurement, thereby improving measurement precision without requiring complex temperature control systems
Solution Approach 2:
The patent changes the measurement parameter from direct pressure-based flow rate calculation to a corrected calculation that incorporates temperature data. By introducing temperature as an additional parameter and using it to adjust the flow rate calculation, the system compensates for temperature-induced errors in the build-up method
2Measurement precision
If multiple sensors are added to account for temperature changes and sensor deviations, then measurement precision improves, but device complexity increases
Solution Approach 1:
The patent makes the existing pressure sensors multi-functional by using them for both pressure measurement and indirect temperature compensation. The system processes data from standard sensors in a way that serves multiple purposes: direct flow rate calculation and temperature effect correction, thereby improving precision without adding specialized temperature sensing hardware
Solution Approach 2:
The patent introduces a correction factor as an intermediary element that mediates between the raw pressure measurements and the final flow rate calculation. This correction factor, derived from temperature data, acts as a computational bridge that accounts for temperature variations without requiring direct physical intervention in the measurement system
3Measurement precision
If the flow rate measuring system is not inspected for temperature effects, then ease of operation is maintained, but measurement precision deteriorates
Solution Approach 1:
The patent implements self-service by enabling the measurement system to automatically compensate for temperature effects using its own sensors and processing capabilities. The system performs its own calibration and correction without requiring external intervention or complex operational procedures, maintaining ease of use while improving precision
Solution Approach 2:
The patent applies feedback by using temperature measurement data to continuously adjust the flow rate calculation. The system monitors temperature conditions and feeds this information back into the measurement algorithm, automatically correcting for temperature-induced errors without requiring manual calibration or complex operational steps
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method allows for the determination of whether the flow rate measuring system is accurately set for gas flow rate calculation, enabling precise control and minimizing errors in substrate processing by accounting for temperature changes and sensor performance.
Implementation Method 1
a first pressure sensor and a second pressure sensor are configured to measure a pressure within the second gas flow path
Implementation Method 2
a temperature sensor is configured to measure a temperature within the second gas flow path
Implementation Method 3
the flow rate is obtained from an increase rate of a pressure within the gas flow path, a temperature within the gas flow path, and an obtained volume
Data Source
AI summary
Disclosed is a method of inspecting a flow rate measuring system used in a substrate processing system. The flow rate measuring system provides a gas flow path used for calculating a flow rate in a build-up method. A gas output by a flow rate controller of a gas supply unit of the substrate processing system may be supplied to the gas flow path. In the method, apart from a previously obtained initial value of a volume of the gas flow path, a volume of the gas flow path is obtained at the time of inspection of the flow rate measuring system. Then, the obtained volume is compared to the initial value.