Flow rate regulating device and control method of flow rate regulating device
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Solution Overview
Problem
The existing flow rate regulating devices face challenges in maintaining high fluid purity due to particle generation caused by assembly and dimensional errors between the valve body and valve seat components, particularly when handling high-purity fluids like those used in semiconductor manufacturing.
Innovation Solution
A flow rate regulating device with a valve body and valve seat mechanism that maintains a non-contact state through precise control by a stepping motor and moving member, ensuring accurate regulation of the fluid flow rate even with assembly or dimensional errors, using a micro step unit control and optimized geometric configurations to minimize particle generation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the diaphragm needle is moved upward and downward to regulate flow rate, then the flow rate control function is achieved, but the diaphragm needle comes in contact with the fluid inlet causing particle generation when positioning accuracy or dimensional accuracy is insufficient
Solution Approach 1:
The patent applies preliminary action by pre-positioning the diaphragm needle at a safe distance from the fluid inlet using a positioning member, preventing contact before it can occur. The drive unit is designed with built-in positioning features that ensure the diaphragm needle starts in a non-contact state, eliminating the need for complex real-time monitoring to prevent particle generation.
Solution Approach 2:
The patent introduces a positioning member as an intermediary component between the drive unit and the diaphragm needle. This positioning member maintains a predetermined distance between the diaphragm needle and the fluid inlet, acting as a mediator that prevents direct contact while still allowing the diaphragm needle to move for flow rate regulation.
2Manufacturing precision
If assembly errors or dimensional errors occur during installation, then the central axes of the fluid inlet and diaphragm needle are not matched, but the diaphragm needle still moves without contact through micro step control
Solution Approach 1:
The patent applies parameter changes by using micro step control to precisely adjust the position of the diaphragm needle in small increments. This allows the system to compensate for assembly errors or dimensional variations by making fine position adjustments, ensuring the diaphragm needle maintains a safe distance from the fluid inlet while still achieving accurate flow rate regulation.
Solution Approach 2:
The positioning member is pre-configured with positioning features that establish a safe initial position for the diaphragm needle. This preliminary positioning action ensures that even if assembly errors occur, the diaphragm needle starts in a position that prevents contact with the fluid inlet, maintaining fluid purity.
3Measurement precision
If the valve body surface and valve seat surface are brought into contact to achieve precise flow rate regulation, then the flow rate control accuracy is improved, but particles are generated from material contact
Solution Approach 1:
The patent uses preliminary action by pre-positioning the diaphragm needle at a predetermined distance from the fluid inlet using the positioning member. This initial positioning prevents contact between the valve body surface and valve seat surface, eliminating particle generation while still allowing precise flow rate regulation through controlled movement within the non-contact range.
Solution Approach 2:
The positioning member acts as an intermediary that maintains a safe distance between the diaphragm needle and the fluid inlet. This intermediary structure prevents direct contact between surfaces that would generate particles, while still enabling precise flow rate control through the regulated movement of the diaphragm needle within the established safety margin.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device effectively inhibits particle generation and accurately regulates fluid flow rates, maintaining high purity, especially in applications involving high-purity fluids, by ensuring non-contact surfaces and controlled movement of the valve components.
Implementation Method 1
the regulation mechanism has a stepping motor that rotates a drive shaft about the axis
Data Source
AI summary
There is provided a flow rate regulating device including a valve body section having a flat valve body surface, a valve seat section having a flat valve seat surface, a regulation mechanism that moves the valve body section along an axis, and a control unit that controls the regulation mechanism, wherein the regulation mechanism has a stepping motor that rotates a drive shaft about the axis, and a moving member that moves along the axis in response to the rotation of the drive shaft and is coupled to the valve body section, and the control unit controls the stepping motor so that the valve body section moves in a movement range in which the valve body surface and the valve seat surface maintain a non-contact state, in accordance with an excitation signal that changes by a micro step unit obtained by dividing a step by a predetermined division number.