Flow Separator for Two-Phase Flow Measurement in Lithography
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Solution Overview
Problem
Detecting and measuring two-phase flow in lithographic apparatuses is challenging due to the difficulty in determining the gas-liquid ratio using pressure sensors, which affects the operation and performance of immersion lithography systems.
Innovation Solution
A system comprising a conduit for two-phase flow, a flow separator to separate the flow into gas and liquid phases, and flow meters to measure the flow rate of each phase, allowing for accurate measurement and control of the gas-liquid ratio.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If pressure sensors are used to measure two-phase flow, then the measurement can be performed, but the gas-liquid ratio cannot be accurately determined
Solution Approach 1:
The two-phase flow is segmented into separate gas and liquid phases using a flow separator, allowing independent measurement of each phase's flow rate. This segmentation enables accurate determination of the gas-liquid ratio while maintaining measurement capability through simple pressure sensors.
2Manufacturing precision
If immersion liquid is used in lithography, then imaging precision is improved, but flooding risk increases
Solution Approach 1:
Flow meters provide real-time feedback on the actual flow rates of gas and liquid phases, enabling the control system to adjust operating parameters to prevent flooding while maintaining the benefits of immersion liquid for improved imaging precision.
Solution Approach 2:
The patent replaces purely mechanical flooding prevention mechanisms with a sensor-based control system that uses flow meters and pressure sensors to monitor and regulate two-phase flow, enabling more precise control of immersion liquid to prevent flooding.
3Ease of operation
If two-phase flow measurement is implemented, then flow control is improved, but device complexity increases
Solution Approach 1:
A flow separator acts as an intermediary device that divides the two-phase flow into separate gas and liquid streams, enabling simple pressure sensors and flow meters to accurately measure each phase independently, thus improving flow control without significantly increasing overall system complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise measurement and control of the gas-liquid ratio, optimizing the performance of immersion lithography systems by ensuring correct fluid flow and preventing flooding, thereby improving operational reliability and efficiency.
Implementation Method 1
a flow separator configured to separate the two phase flow into a gas flow and a liquid flow
Data Source
AI summary
A lithographic apparatus is disclosed that includes a conduit for two phase flow therethrough. A flow separator is provided to separate the two phase flow into a gas flow and a liquid flow. A flow meter measures the flow rate of fluid in the gas flow or the liquid flow.