Flow Splitter With Coupled Diaphragm Valves
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Solution Overview
Problem
Existing fluid processing systems in semiconductor industries face challenges in accurately dividing combined process gases among multiple chambers or within a single chamber, as they rely on thermal or pressure sensors which have limited flow range, drift over time, and require recalibration, leading to increased system pressure drop and delayed response.
Innovation Solution
A flow splitter design utilizing two diaphragm valves in a single valve body, coupled for common movement, eliminates the need for thermal or pressure sensors by controlling the flow ratio through the position of one valve affecting the other, allowing precise control without sensors and reducing the required actuator size.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If thermal or pressure sensors are used to measure flow rate through outlet channels, then flow rate measurement is achieved, but the device complexity increases and the system requires recalibration over time
Solution Approach 1:
The patent removes thermal or pressure sensors from the flow splitter system entirely. Instead of using sensors to measure and control flow rates, the invention uses a mechanical coupling mechanism between two diaphragm valves where the position of one valve directly determines the position of the other, eliminating the need for sensors and their associated complexity
Solution Approach 2:
The coupled diaphragm valve system is self-regulating through mechanical linkage. The coupler automatically ensures that as one valve opens, the other closes by the same amount, maintaining flow balance without external sensors or control systems. The system serves itself through the mechanical interdependence of the two valves
2Measurement precision
If thermal or pressure sensors are used to achieve reasonable sensor signal, then flow measurement is obtained, but the system pressure drop increases
Solution Approach 1:
The patent eliminates thermal and pressure sensors from the system, removing the source of excessive pressure drop. The mechanical coupling of diaphragm valves controls flow distribution without requiring sensor-based measurement, thereby maintaining lower pressure drop throughout the system
3Measurement precision
If sensor-based flow splitters are used, then flow distribution is achieved, but the response time is delayed due to oscillation until equilibrium
Solution Approach 1:
The patent removes sensor-based control systems that cause oscillation and delay. The mechanical coupling between diaphragm valves provides immediate, direct control where flow distribution changes instantly with valve actuation, eliminating the oscillation-to-equilibrium period that plagues sensor-based systems
Solution Approach 2:
The invention replaces sensor-based electronic control systems with a purely mechanical coupling mechanism. The physical linkage between diaphragm valves through the coupler provides direct, real-time control without the delays inherent in sensor measurement, signal processing, and actuation cycles
4Measurement precision
If thermal or pressure sensors are used in flow splitters, then flow rate control is achieved, but the sensors drift over time requiring recalibration
Solution Approach 1:
The patent eliminates thermal and pressure sensors from the flow splitter, removing the source of drift and recalibration needs. The mechanical coupling between diaphragm valves provides stable, drift-free flow control that maintains precision indefinitely without requiring recalibration
Solution Approach 2:
The coupled diaphragm valve system maintains its own calibration through mechanical interdependence. The coupler ensures that the valves remain balanced relative to each other, providing self-calibrating operation that eliminates the drift problems inherent in sensor-based systems
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution provides precise control of gas delivery with reduced pressure drop, faster stabilization time, and increased throughput by eliminating sensor drift and recalibration needs, while maintaining precision and repeatability in gas split ratios.
Implementation Method 1
First and second diaphragm valves respectively are movable toward and away from the first and second valve seats for modulating flow between the common passage and the first and second outlets
Implementation Method 2
A coupler couples the first and second diaphragm valves for common movement. The position of one valve is a function of the position of the other valve
Data Source
AI summary
A flow splitter (10) that is uniquely characterized by the use of two diaphragm valves in a single valve body that are arranged in opposition to one another. The diaphragm valves are coupled together for common movement by a coupler, such that the flow rate through respective outlets is a function of the position of either diaphragm valve. That is, the position of one valve is a function of the position of the other valve, and vice versa. With this construction a single actuator can control the ratio of total flow that will be delivered to each of two outlet ports. Moreover, such construction eliminates the need for thermal or pressure sensors and thus the drawbacks associated therewith.