Flow Splitter Mixed Gas Supply System for Uniform Substrate Processing
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional vapor deposition apparatuses become bulky and complex due to the need for multiple mixing pipes and branch lines to supply mixed gases to multiple regions on a susceptor, which complicates the configuration and increases the number of pipes near gas sources, posing challenges as the number of regions and types of gases increase for improved in-plane uniformity.
Innovation Solution
A mixed gas multiple line supply system that uses a flow splitter to split a common mixed gas into multiple supply lines with adjustable flow rates, connected to injectors with gas introducing ports and discharge holes for each region, reducing the number of pipes and components by using a single mixing pipe and flow rate controllers, and optionally partitioning injectors to allow chamber communication through orifices for smooth flow splitting.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple mixing pipes and branch lines are used to supply mixed gases to multiple regions on the susceptor, then gas supply coverage is improved, but the apparatus becomes bulky and complex
Solution Approach 1:
The patent merges multiple separate mixing pipes into a single mixing pipe that supplies mixed gas to multiple regions. The flow splitter divides the mixed gas flow into multiple branches, eliminating the need for multiple mixing pipes and reducing apparatus complexity while maintaining gas supply coverage to multiple regions
2Manufacturing precision
If the number of regions on the susceptor is increased for improved in-plane uniformity, then processing uniformity is improved, but the number of pipes increases remarkably
Solution Approach 1:
The single mixing pipe is designed to serve multiple functions by supplying mixed gas to multiple regions simultaneously. The flow splitter enables one mixing pipe to fulfill the role of multiple mixing pipes, allowing increased number of processing regions without proportional increase in pipe数量
Solution Approach 2:
The flow splitter segments the mixed gas flow from a single mixing pipe into multiple separate streams, each directed to different regions on the susceptor. This segmentation allows one mixing pipe to effectively serve multiple regions, reducing the overall number of pipes needed
3Adaptability or versatility
If multiple mixing pipes are provided to supply identical mixed gas to multiple regions, then gas distribution is improved, but space consumption increases
Solution Approach 1:
Multiple mixing pipes that would normally be distributed throughout the apparatus are merged into a single mixing pipe located in one position. The flow splitter then distributes the mixed gas to multiple regions, significantly reducing the space occupied by piping infrastructure while maintaining gas distribution capability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration minimizes the number of pipes and components, achieving significant space savings and cost reduction while ensuring uniform gas distribution across multiple regions, enhancing in-plane uniformity and substrate processing efficiency.
Implementation Method 1
a flow splitter connected to a common mixed gas supplying passage, the flow splitter configured to split a mixed gas into a plurality of supply lines while adjusting a ratio of flow rates in the plurality of supply lines
Implementation Method 2
an least one injector including a gas introducing port and a gas discharge hole for each of a plurality of regions in the processing container and configured to supply the mixed gas to each of the plurality of regions
Data Source
AI summary
A mixed gas multiple line supply system includes a flow splitter connected to a common mixed gas supplying passage, the flow splitter configured to split a mixed gas into a plurality of supply lines while adjusting a ratio of flow rates in the plurality of supply lines, and an least one injector including a gas introducing port and a gas discharge hole for each of a plurality of regions in the processing container and configured to supply the mixed gas to each of the plurality of regions. The plurality of supply lines of the flow splitter are connected in one-to-one correspondence to the respective gas introducing ports provided for the plurality of regions in the processing container.