Flow Substrate Mounting Structure for Modular Alignment and Stability
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Solution Overview
Problem
Existing fluid delivery systems in semiconductor processing and petrochemical industries require specific mounting structures for fluid flow substrates and manifolds, limiting their versatility and compatibility with alternative designs, especially in extreme flow rate and high-temperature applications.
Innovation Solution
A modular mounting structure that can be used with various fluid flow substrates and combinations of substrates and manifolds, allowing for interchangeable components and minimal material usage, enabling efficient mounting and airflow around the substrates while providing a compact design.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If specific mounting structures are used for particular fluid delivery system designs, then the mounting is secure and stable, but the versatility and compatibility with alternative designs are limited
Solution Approach 1:
The mounting structure is designed with a universal interface that can accommodate multiple flow substrate designs. The mounting bracket includes a standardized mounting surface with patterned apertures that can secure different types of flow substrates, allowing the same mounting structure to be used across various fluid delivery system configurations rather than requiring design-specific mounting solutions.
2Adaptability or versatility
If modular mounting structures with interchangeable components are used, then the versatility and compatibility are improved, but the device complexity increases
Solution Approach 1:
The mounting structure is divided into distinct modular components including a mounting bracket, flow substrate, and sealing elements. Each component can be independently manufactured, installed, and replaced. The mounting bracket serves as a universal base that can accommodate different flow substrate designs through standardized interfaces, reducing overall system complexity while maintaining versatility.
3Weight of stationary object
If minimal material usage is implemented in the mounting structure, then the manufacturing cost and weight are reduced, but the structural strength and stability may be compromised
Solution Approach 1:
The mounting bracket is designed with strategically placed reinforcement zones at critical stress points such as the aperture edges and mounting surfaces, while other areas use minimal material. This localized strengthening approach ensures structural integrity and stability where needed while minimizing overall material usage and weight of the mounting structure.
Data Source
AI summary
A flow substrate mounting structure comprising a fastener aperture and an alignment feature, wherein the alignment feature comprises at least one of an alignment pin removably coupled with the flow substrate mounting structure, an alignment slot, and an alignment step. A structure for coupling a plurality of flow substrates comprising a flow substrate mounting structure comprising a first fastener aperture, and a second fastener aperture, wherein the first fastener aperture is configured to couple with a first fastener and the second fastener aperture is configured to couple with a second fastener, wherein an alignment fixture is used to align the flow substrate mounting structure with the plurality of flow substrates.


