Fluid Blending Recirculation Loop for Low Pressure Fluctuation
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Solution Overview
Problem
Existing methods for blending liquids in semiconductor fabrication, such as flow controller blending, are sensitive to pressure variations, leading to over-adjustment and amplification of process variations, and require costly maglev pumps and additional tanks to reduce pressure fluctuations, making them more expensive and complex compared to scale or beaker blending techniques.
Innovation Solution
A pump and flow controller system with closed-loop flow rate control, incorporating a low pressure fluctuation pump or a pump in series with a pressure regulator, which reduces pressure fluctuations by adjusting the pump's flow capacity and operating parameters, eliminating the need for separate regulators and control valves, and using a regulator-and-control-valve-in-one device to suppress pressure fluctuations and control flow rates effectively.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of time
If flow controller blending is used, then immediate availability of the blend is achieved, but the system becomes sensitive to pressure variation causing over-adjustment
Solution Approach 1:
A decoupling tank is introduced as an intermediary component between the flow controller and the mixing process. The tank receives controlled flows from multiple flow controllers and performs the mixing function, allowing the flow controllers to operate independently without direct pressure interference from each other, thus reducing over-adjustment while maintaining immediate blend availability
Solution Approach 2:
The blending system is segmented into separate flow control paths for each ingredient, with each path having its own flow controller. The flows are then combined in a common tank rather than mixing in a single controlled environment, allowing independent pressure management for each stream and reducing coupled pressure variations
2Stability of the object's composition
If maglev pump is used to reduce pressure variation, then pressure fluctuation is reduced, but the system complexity and cost increase
Solution Approach 1:
Instead of using an expensive maglev pump to eliminate pressure variations, the invention uses conventional pumps combined with a decoupling tank that copies the function of pressure stabilization through volume buffering. The tank absorbs pressure fluctuations without requiring sophisticated pump technology, achieving similar results with simpler, more cost-effective components
Solution Approach 2:
The invention replaces expensive, complex maglev pumps with conventional, readily available pumps. The pressure stability function is achieved through the decoupling tank rather than through expensive pump technology, using cheaper, more maintainable components to achieve the same functional outcome
3Ease of manufacture
If conventional pump is used, then system cost is reduced, but pressure variation increases causing flow controller over-adjustment
Solution Approach 1:
A decoupling tank is introduced as an intermediary that buffers between the conventional pump and the flow controllers. The tank absorbs the pressure variations generated by the conventional pump, preventing them from reaching the flow controllers and causing over-adjustment, thus enabling the use of cost-effective pumps without sacrificing flow control stability
Solution Approach 2:
The decoupling tank provides beforehand cushioning by absorbing and dampening pressure variations before they can affect the flow controllers. The tank acts as a pressure buffer that smooths out fluctuations in advance, protecting the sensitive flow control system from the inherent pressure variations of conventional pumps
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution provides consistent, low-pressure flow to flow controllers, reducing the need for costly components and complexity, enabling reliable and accurate blending with minimal pressure variation, thus improving the efficiency and cost-effectiveness of the blending process.
Implementation Method 1
A pump removes liquid from a liquid supply container
Implementation Method 2
The recirculation loop reduces pressure fluctuation of a liquid stream
Implementation Method 3
A pump and flow controller system with closed-loop flow rate control
Data Source
AI summary
A low pressure fluctuation control apparatus comprises a liquid recirculation loop comprising a dip tube, a diaphragm or bellows type pump, a first regulator, a first flow meter, a junction, and a return tube. A back pressure controller is located in the return tube. In addition, the apparatus comprises a material supply line fluidly connected the liquid recirculation loop via the junction. A flow control system is located in the material supply line. The recirculation loop draws liquid from a supply container by the dip tube, and returns a portion of the liquid to the supply container by the return tube. The backpressure flow controller regulates the flow rate of the liquid, thereby steadying fluctuations in the liquid being supplied.