Fluid Transfer Connector Cleaning Layout to Prevent Fluid Contamination
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Solution Overview
Problem
Existing fluid transfer connectors in semiconductor manufacturing risk contaminating liquid chemicals with cleaning liquids due to improper placement of injection ports, leading to mixing with the intended fluid during connection.
Innovation Solution
A fluid transfer connector design featuring a plug with a cleaning liquid supply hole positioned opposite to the sealing member, preventing leakage into the fluid channel, and an inclined cleaning liquid supply hole to effectively direct cleaning liquids away from the fluid transfer path, along with a separate gas supply hole for enhanced purging.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If the injection port is located closer to the socket for effective cleaning, then the cleaning liquid can reach the connection area, but the cleaning liquid may be led into the cleaning chamber and mixed into the liquid chemical, contaminating the fluid
Solution Approach 1:
The invention divides the cleaning liquid supply path into separate zones by providing multiple injection ports at different locations. One injection port supplies cleaning liquid to the cleaning chamber while another supplies to the plug body housing part, preventing cross-contamination between the cleaning area and fluid transfer area.
Solution Approach 2:
The sealing member acts as an intermediary barrier between the cleaning liquid supply and the fluid channel. By positioning the cleaning liquid supply hole at a location where cleaning liquid flows away from the sealing member rather than toward it, the sealing member prevents cleaning liquid from penetrating into the fluid transfer path.
2Ease of manufacture
If the cleaning liquid supply hole is positioned to clean the plug body housing part, then the connector interior can be effectively cleaned, but cleaning liquid may leak and mix with the transferred fluid
Solution Approach 1:
Instead of positioning the cleaning liquid supply hole to flow toward the plug body distal end (which would risk contamination), the invention inverts the flow direction by positioning it to flow away from the sealing member. This reverse positioning ensures cleaning liquid is directed toward safe drainage paths rather than toward the fluid interface.
3Device complexity
If a single injection port is used for cleaning, then the device structure is simple, but the cleaning liquid cannot be effectively directed away from the fluid transfer path
Solution Approach 1:
The invention adds spatial dimensionality to the cleaning system by providing injection ports at multiple locations (both in the cleaning chamber and in the plug body housing part). This multi-dimensional arrangement of injection ports enables comprehensive cleaning coverage while maintaining clear separation between cleaning liquid paths and fluid transfer paths.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Prevents cleaning liquid from mixing with the transferred fluid and ensures effective cleaning and purging of the connector's interior, maintaining fluid integrity during transfer operations.
Implementation Method 1
a sealing member provided in the plug body housing part, that seals an outer periphery of the plug body inserted in the socket body
Implementation Method 2
a cleaning liquid supply hole that supplies a cleaning liquid into the plug body housing part at a position opposite to the distal end of the plug body with respect to the sealing member
Implementation Method 3
the cleaning liquid supply hole is provided to be inclined toward the distal end side of the plug body
Data Source
AI summary
A liquid transfer connector according to the present disclosure is provided with a plug having a plug body in which a fluid channel is formed, a socket having a socket body in which a fluid channel communicating with the fluid channel is formed when the plug is connected, a plug body housing part provided in the socket body, that receives and houses a distal end of the plug body inserted therein at a time of connection, an O-ring provided in the plug body housing part, that seals an outer periphery of the plug body inserted in the socket body and a cleaning liquid supply hole that supplies a cleaning liquid into the plug body housing part at a position opposite to the distal end of the plug body with respect to the O-ring.