Fluid Control Apparatus Modular Joint Assembly
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Solution Overview
Problem
The existing fluid control apparatuses in semiconductor manufacturing require significant time and effort for positioning fluid control devices to straddle adjacent joint members, leading to inefficiencies in assembly.
Innovation Solution
A fluid control apparatus with block-shaped joint members and seal means, where joint members are mounted through male screw members from above, allowing for linear fluid flow channels and efficient assembly by coupling joint members in the front and rear direction, reducing the need for straddling and minimizing interference between screw members.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If fluid control devices are arranged to straddle adjacent joint members, then space occupied by the apparatus is reduced, but assembling operation efficiency deteriorates due to time and efforts required for positioning
Solution Approach 1:
The joint members are segmented into modular block-shaped units with standardized screw insertion holes and abutting surfaces. Each joint member can be independently assembled and then connected to adjacent units, eliminating the need for complex positioning operations while maintaining compact space utilization.
Solution Approach 2:
The screw insertion holes are pre-positioned at standardized locations on each joint member, and the abutting surfaces are pre-configured with seal means. This preliminary preparation allows for rapid assembly without time-consuming positioning operations, as each component is ready for immediate connection.
2Reliability
If multiple male screw members are used to couple joint members, then sealing reliability is improved, but device complexity and weight increase
Solution Approach 1:
The sealing function is extracted from the screw members themselves and assigned to dedicated seal means (such as O-rings or gaskets) positioned on the abutting surfaces. This allows a single screw member to provide both mechanical fastening and sealing, eliminating the need for multiple screw members while maintaining sealing reliability.
Solution Approach 2:
The male screw members are designed to perform multiple functions: mechanical fastening of joint members and support for seal means. This multi-functionality reduces the total number of components needed while ensuring both structural integrity and sealing performance.
3Ease of operation
If joint members are coupled through male screw members from above, then assembly operation is simplified, but interference between screw members may occur
Solution Approach 1:
The screw insertion holes are positioned at different vertical levels (heights) on adjacent joint members. This dimensional differentiation allows screw members to be inserted from above without interfering with each other, while still achieving secure coupling of the joint members.
Data Source
AI summary
There is provided a fluid control apparatus which can improve assembling operation efficiency. A screw insertion hole 29 extending in a front and rear direction have a stepped portion 29a which receives a head portion 18a of a male screw member 18, and the stepped portion 29a is positioned at a position closer to an inserted tip end side of a male screw member 28 in the front and rear direction than a position, in the front and rear direction, of male screw members 34 from above. By fastening the male screw member 18 in the front and rear direction at first and then fastening the male screw member 34 from above, it is possible to prevent the male screw member 18 in the front and rear direction and the male screw member 34 from above from interfering with each other.