Fluid Control Device With Etched Link Portions

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Solution Overview

Problem

Conventional fluid pumps face challenges in miniaturization while maintaining performance, as they tend to experience reduced discharge pressure and flow rate due to structural limitations, and adhesive issues can block vibrations and fluctuate pressure-flow rate characteristics.

Innovation Solution

A fluid control device with a vibrating plate unit that includes a vibrating plate, a frame plate, and link portions, where the link portions are thinner than the frame plate and etched to create a gap, preventing adhesive blockage and allowing accurate determination of the distance affecting pressure-flow rate characteristics, thereby maintaining performance and stability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If the fluid pump is miniaturized to reduce device size, then the device becomes smaller and more suitable for compact applications, but the pump performance (discharge flow rate and discharge pressure) decreases

Engineering Contradiction:
Improvedevice sizeVSAvoidpump performance
Core Design Contradiction:
Volume of moving objectVSProductivity

Solution Approach 1:

The pump body is divided into multiple chambers (first chamber and second chamber) with separate fluid paths, allowing independent control of fluid intake and discharge. This segmentation enables the miniaturized pump to maintain efficient fluid handling despite reduced overall size.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent utilizes three-dimensional spatial arrangement of components, with the piezoelectric element positioned at the center of the vibrating plate and chambers arranged in specific spatial relationships. This dimensional optimization allows maximum pump performance within a minimized footprint.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Ease of manufacture

If the vibrating plate is directly fixed to the frame plate using adhesive, then the structure becomes simpler and easier to manufacture, but the adhesive blocks the vibration of the vibrating plate and causes fluctuation in pressure-flow rate characteristics

Engineering Contradiction:
Improveassembly simplicityVSAvoidpressure-flow rate stability
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

A resin layer is introduced as an intermediary substance between the vibrating plate and frame plate. This resin layer fills the gap created by the thickness difference, prevents adhesive from reaching the vibrating plate's vibration surface, and maintains reliable bonding while allowing full vibration amplitude.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The vibrating plate is designed with non-uniform thickness, being thinner at the center (where vibration occurs) and thicker at the periphery (where bonding occurs). This local quality variation allows the plate to vibrate freely at the vibration surface while maintaining structural integrity and bonding capability at the edges.

Inventive Principle:
Principle #3Local quality

3Length of stationary object

If the vibrating plate is made thinner to reduce device thickness, then the overall pump thickness is reduced, but the structural strength and vibration control become more difficult

Engineering Contradiction:
Improvepump thicknessVSAvoidvibrating plate strength
Core Design Contradiction:
Length of stationary objectVSStrength

Solution Approach 1:

The vibrating plate employs variable thickness design with the center portion being thinner (first thickness) to reduce overall pump thickness and the peripheral portion being thicker (second thickness) to provide structural strength and bonding area. This local quality differentiation resolves the contradiction between thinness and strength.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent uses a composite structure combining the vibrating plate, resin layer, and frame plate. This composite approach allows the thin vibrating plate to maintain sufficient strength through the supporting resin layer and frame plate structure while achieving reduced overall thickness.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enhances the fluid control device's ability to maintain high discharge pressure and large discharge flow rates despite its small size, while preventing adhesive blockage and ensuring consistent pressure-flow rate characteristics, thus addressing the limitations of conventional pumps.

Implementation Method 1

by applying voltage having a predetermined frequency to the piezoelectric element 23, a portion of the vibrating plate 20 that faces the first opening 11 and a portion of the vibrating plate 20 that faces the second opening 12 are bent and deformed in opposite directions

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

The link portion 34 has an elastic structure having the elasticity of a small spring constant. Therefore, the vibrating plate 31 is flexibly and elastically supported at two points against the frame plate 33 by two link portions 34.

Methodology Applied
Scientific EffectElasticity: Elasticity

Data Source

PatentEP3290707B1Fluid control device
Publication Date: 2018.12.05 MURATA MFG CO LTD
  • EP3290707B1 patent drawingFigure 1A~1E
  • EP3290707B1 patent drawingFigure 2
  • EP3290707B1 patent drawingFigure 3

AI summary

A fluid control device (101) comprises: a vibrating plate (141) including a first main surface and a second main surface; a frame plate (161) that surrounds the vibrating plate (141); a driver (142) provided on the first main surface of the vibrating plate; and a flexible plate (151) that includes a hole (152) facing the second main surface of the vibrating plate (141) and is fixed to the frame plate (161). The fluid control device further includes a plurality of link portions (162) that link the vibrating plate (141) and the frame plate (161) and elastically support the vibrating plate (141) against the frame plate (161) with a gap between the frame plate (161) and the vibrating plate (141); wherein the plurality of link portions (162) connect a portion of the vibrating plate (141) and the frame plate (161) across the gap; and the flexible plate (151) includes a hole portion (198) formed in a region in which the flexible plate (151) faces the plurality of the link portions (162).