Fluid Control Apparatus Fixing Structure for Narrow Width
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Solution Overview
Problem
The integration of fluid control apparatuses in semiconductor manufacturing equipment faces challenges in reducing the installation area, particularly in narrowing the width of passage members, as conventional methods requiring four bolts for coupling obstruct this reduction and pose difficulties in placing bolt insertion holes without interfering with fluid passages.
Innovation Solution
A fixing structure that uses two bolts to couple passage members, with these bolts positioned in opposite directions at the middle portion of the passage members, allowing for secure fixation of the seal member without interfering with fluid passages, and includes a gasket-type filter with a diameter equivalent to the passage members' width to maintain flow rate, enabling a narrower width fluid control apparatus.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If four bolts are placed in four corners of passage members for coupling, then the seal member is securely fixed, but the width of the fluid control apparatus increases
Solution Approach 1:
The patent transitions from a symmetric four-bolt arrangement (four bolts at four corners) to an asymmetric two-bolt arrangement (two bolts at opposite ends of the middle portion). This asymmetric repositioning reduces the width requirement while maintaining coupling reliability through strategic bolt placement that still secures the seal member effectively.
Solution Approach 2:
The bolt placement moves from the corner positions (peripheral dimension) to the middle portion along the length direction. By utilizing the length dimension more effectively and positioning bolts at opposite ends of the middle portion, the design achieves secure fixation without requiring four corner bolts, thereby reducing width.
2Length of stationary object
If two bolts are placed in the center of passage members for coupling, then the width of the fluid control apparatus is reduced, but providing two through holes without reaching the fluid passage becomes difficult
Solution Approach 1:
The patent applies local quality by making the middle portion of the passage members thicker than other portions. This localized thickness increase provides sufficient material depth to accommodate two through holes at opposite ends of the middle portion without these holes reaching the fluid passage, thereby solving the manufacturing difficulty while maintaining reduced width.
3Area of stationary object
If the passage members are narrowed to reduce installation area, then the integration is improved, but the coupling structure becomes more constrained
Solution Approach 1:
The coupling structure is segmented into distinct functional zones: the middle portion with increased thickness for bolt hole accommodation, and the narrower main body for reduced installation area. This segmentation allows the passage members to maintain narrow overall dimensions while providing a localized robust coupling region that accommodates the two-bolt arrangement effectively.
Data Source
AI summary
Passage members each have a required width, a required height, and a required length, and are provided at middle portions in the width direction with fluid passages, respectively. As coupling means, two bolts are used. The middle portion in the width direction of each of the passage members has opposite end portions that are each provided with a female screw and a bolt insertion hole to be faced by the female screw, respectively. The upper bolt is inserted into one of the passage members and is screwed into the female screw of the other passage member. The lower bolt is inserted into the other passage member and is screwed into the female screw of the one of the passage members. The passage members are coupled with use of the two upper and lower bolts whereby a seal member is securely fixed.