Compact Fluid Control Joining Block for Semiconductor Systems
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing fluid control systems for semiconductor manufacturing are too bulky and difficult to assemble, leading to reduced responsiveness and maintainability, as they become more compact, which in turn decreases the supply flow rate and increases assembly time.
Innovation Solution
A compact and integrated fluid control system design featuring a joining block with a guide part and support member, allowing for constrained movement and reduced bolt connections, maintaining flow path cross-sectional area and simplifying assembly and maintenance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If the fluid control system is made more compact to increase responsiveness, then the system size is reduced and responsiveness is improved, but the cross-sectional area of the fluid flow path decreases and the supply flow rate is reduced
Solution Approach 1:
The joining block utilizes a three-dimensional flow path configuration where the second flow path extends linearly through the interior of the joining block in the longitudinal direction, connecting first flow paths from multiple fluid devices. This spatial arrangement allows compact integration while preserving adequate flow cross-sectional area by utilizing the depth dimension of the joining block structure.
Solution Approach 2:
The system is divided into modular components (fluid devices, joining blocks, support members) that can be independently assembled. Each joining block handles specific fluid paths from specific fluid devices, allowing the system to be compact yet maintain adequate flow paths through optimized modular configuration.
2Speed
If the fluid control system is made more compact and integrated, then the system size is reduced and responsiveness is improved, but assembly becomes difficult and assembly man-hours increase
Solution Approach 1:
The system is divided into modular components (fluid devices, joining blocks, support members) that can be independently assembled. Each joining block is a self-contained unit with integrated flow paths and connection interfaces, simplifying the overall assembly process while achieving compact integration.
Solution Approach 2:
The joining block merges multiple functions into a single component: it provides structural support, defines fluid flow paths, provides connection interfaces for fluid devices, and includes engaging parts for mounting on support members. This functional integration reduces the number of separate parts and assembly steps.
3Speed
If the fluid control system is made more compact and integrated, then the system size is reduced and responsiveness is improved, but the maintainability of the system deteriorates
Solution Approach 1:
The system is divided into modular components that can be independently accessed and maintained. Fluid devices are connected to the support member via joining blocks, allowing individual fluid devices to be removed or replaced without disassembling the entire system, thereby improving maintainability while maintaining compact integration.
4Strength
If multiple bolt connections are used to secure fluid devices to the support member, then the connection strength is improved, but the assembly time increases and assembly complexity increases
Solution Approach 1:
The joining block merges multiple functions into a single component: it provides structural support, defines fluid flow paths, provides connection interfaces for fluid devices, and includes engaging parts for mounting on support members. This functional integration reduces the number of separate parts and assembly steps.
Solution Approach 2:
Instead of securing fluid devices directly to the support member with multiple bolts, the joining block is designed with an engaging part that engages with the support member, while the fluid device connects to the joining block. This inverted connection architecture simplifies the assembly process while maintaining connection strength.
Data Source
AI summary
A fluid flow path of a joining block includes a vertical flow path and a horizontal flow path. The joining block is constrained on a rail member so as to be capable of moving in a longitudinal direction. A fluid control device is supported by the rail member via the joining block and includes a screw hole, and a tightening bolt that has passed through a body of the fluid control device is screwed into the screw hole. A gasket between the joining block and the body is compressed between the body and the joining block by a tightening force of the tightening bolt. The screw hole includes the tip portion closed above the horizontal flow path and at least partially overlaps the horizontal flow path in a planar view.