Compact Fluid Control System With Nested Screw Holes
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Solution Overview
Problem
Existing fluid control systems for manufacturing processes, such as semiconductor manufacturing, face challenges in miniaturization and integration while maintaining a reliable seal and sufficient fluid flow rate, as they require a balance between compactness and the need for fastening bolts for sealing, which complicates reducing the base block dimensions.
Innovation Solution
A fluid control system design featuring first and second base blocks with overlapping screw holes and protruding pipe parts that eliminate the need for through holes for fastening bolts, allowing for a more compact and integrated configuration without compromising seal performance or fluid flow rate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If the base block dimensions are reduced to achieve miniaturization and integration, then the compactness and integration level improve, but the seal performance between the base block and fluid devices deteriorates due to insufficient space for fastening bolts
Solution Approach 1:
The screw holes are positioned to overlap in the plan view (top-down dimension) while being at different depths (vertical dimension), creating a three-dimensional arrangement that saves horizontal space while maintaining fastening capability. This dimensional transition allows the base block to be narrower without compromising seal performance.
Solution Approach 2:
One screw hole is positioned inside another screw hole in the plan view, with the second screw hole located deeper in the base block. This nested arrangement allows both screw holes to occupy the same horizontal footprint while maintaining separate fastening functions, thereby reducing the overall base block width.
2Volume of moving object
If the base block dimensions are reduced to improve integration, then the system compactness improves, but the cross-sectional area of the fluid flow path must be reduced which decreases the supply flow rate
Solution Approach 1:
The flow path cross-sectional area is preserved in the vertical dimension while the horizontal dimension is reduced through overlapping screw hole positioning. This allows the base block to be narrower without reducing the fluid flow capacity, as the flow path area is maintained through vertical space utilization rather than horizontal expansion.
3Device complexity
If the number of through holes for fastening bolts is reduced to simplify the structure, then the manufacturing complexity decreases, but the seal reliability deteriorates
Solution Approach 1:
The nested screw hole configuration maintains two fastening points (one screw hole containing another) without requiring additional through holes that would penetrate the base block. This nested arrangement simplifies the overall structure by eliminating the need for separate through holes while preserving the dual fastening capability required for reliable sealing.
Data Source
AI summary
A fluid control system is provided which, without reducing the supply flow rate of a fluid, is considerably more miniaturized and integrated. This fluid control system includes base blocks and fluid devices respectively installed on upper surfaces of the base blocks. The base blocks each include protruding pipe parts protruding in a longitudinal direction. The protruding pipe parts each communicate with a corresponding second flow path. The protruding pipe part on a downstream side end surface of the base block and the protruding pipe part on an upstream side end surface of the base block are air-tightly or liquid-tightly connected to each other by a welding material.