Fluid Control Device Assembly with Nesting Positioning
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Solution Overview
Problem
Conventional fluid control devices in semiconductor manufacturing require extensive time for assembling due to simultaneous positioning and fastening of movable rails, apply high stresses on fastening members, and result in increased device height, necessitating larger housing spaces.
Innovation Solution
A fluid control device with a rectangular frame base member and orthogonal lateral frame members, featuring recessed positioning portions for line support members, allows for separate positioning and fixing, reducing the need for bolts and minimizing stress on fastening members, while using cover members to clamp line support members and reduce overall device height.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If positioning and fastening of the movable rail are simultaneously performed using only a fastening member, then the structure is simplified, but positioning of the movable rail takes a considerable time and large stresses are applied to the fastening member
Solution Approach 1:
The patent divides the fastening process into two separate operations: positioning and fastening. Positioning is achieved through positioning portions (such as positioning holes or guide structures) that align the movable rail with the fixed rail, while fastening is performed separately using fastening members. This segmentation allows positioning to be done quickly and accurately without the time-consuming operation of simultaneous fastening, while also reducing the stress burden on fastening members.
2Manufacturing precision
If the end portion of the movable rail overlaps with the fixed rail, then the movable rail can be positioned, but the height of the support portion becomes the sum of heights of both rails, increasing the overall device height
Solution Approach 1:
The patent employs a nesting structure where the movable rail is positioned within or alongside the fixed rail in such a way that the end portion of the movable rail does not extend beyond the fixed rail's height. The positioning portions are designed to fit within the confines of the fixed rail structure, allowing accurate positioning while maintaining a compact overall height. This eliminates the need to add the heights of both rails together.
3Reliability
If a plurality of large stresses are applied to the fastening member for simultaneous positioning and fastening, then the fastening is secure, but the fastening member is subjected to excessive stress
Solution Approach 1:
The patent separates the positioning function from the fastening function. Positioning portions (such as positioning holes, guide rails, or alignment features) provide precise alignment without requiring fastening members to bear positioning loads. Fastening members then only need to provide securing force, not positioning force. This segmentation significantly reduces the stress on fastening members while maintaining secure fastening.
Data Source
AI summary
Provided is a fluid control device which can shorten an assembling time by facilitating positioning of a line support member and can suppress the increase of a height of a portion which supports fluid control equipment. A base member is formed in a rectangular frame shape by an upper lateral frame member, a lower lateral frame member, and left and right longitudinal frame members which are orthogonal to the upper and lower lateral frame members. A positioning portion for positioning each line support member is provided to the respective lateral frame members. Upper and lower end portions of each line support member are clamped between the respective lateral frame members and upper and lower cover members detachably mounted on the base member in a state where the upper and lower end portions of each line support member are positioned by the positioning portions provided to the respective lateral frame members.