Miniature Fluid Control Device Piezoelectric Actuator Vibration Damping
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Solution Overview
Problem
Conventional miniature fluid control devices are bulky, noisy, and inefficient due to insufficient adhesive thickness and rigidity, leading to energy loss and noise generation during operation.
Innovation Solution
A miniature fluid control device with a piezoelectric actuator featuring a square suspension plate and a reduced thickness outer frame, where the adhesive layer is increased in thickness to enhance adhesion and absorb vibration energy, and the components are etched at the same depth for a coplanar surface, improving kinetic energy utilization and noise reduction.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-generated harmful factors
If the adhesive layer thickness is increased to improve vibration energy absorption and reduce noise, then the device structure becomes more complex and manufacturing difficulty increases
Solution Approach 1:
The patent combines the adhesive layer with the gap between the resonance plate and outer frame into a single functional element. The adhesive layer is applied to fill the gap h0, creating a unified structure that serves both bonding and vibration damping functions, eliminating the need for separate damping components
Solution Approach 2:
The patent uses a thin film adhesive layer (thickness t1) that is flexible enough to absorb vibration energy but thin enough to maintain structural integrity. The adhesive layer acts as a flexible damping element that reduces noise while maintaining the compact device structure
2Length of moving object
If the outer frame thickness is reduced to achieve a slimmer device profile, then the structural rigidity decreases and manufacturing precision becomes more difficult to maintain
Solution Approach 1:
The patent changes the etching depth parameter from multiple depth levels to a single uniform depth (h1) for all components. This parameter simplification allows for consistent etching of the suspension plate, outer frame, and bracket at the same depth, ensuring coplanar surfaces and improving manufacturing precision while enabling a thinner overall profile
Solution Approach 2:
The patent applies local quality by creating a coplanar surface specifically at the interface between the suspension plate, outer frame, and bracket through uniform etching. This localized precision at the critical interface area maintains structural integrity while allowing reduced overall thickness
3Ease of manufacture
If multiple etching depths are used to create height differences for adhesive application, then the manufacturing process becomes more complex with multiple etching steps
Solution Approach 1:
Instead of creating height differences through multiple etching depths to facilitate adhesive application, the patent inverts the approach by using a single etching depth and allowing the adhesive to fill the gap naturally. The adhesive layer thickness is controlled by the gap dimension rather than by creating stepped surfaces, simplifying the etching process to a single step
4Volume of moving object
If the device is miniaturized to meet portable application requirements, then the volume of motors and pressure valves must be reduced, but this leads to increased noise and reduced functionality
Solution Approach 1:
The patent replaces traditional mechanical pneumatic components (motors and pressure valves) with a piezoelectric actuator that directly drives the suspension plate to generate acoustic waves. This mechanical substitution eliminates the need for bulky motors and pressure valves, achieving miniaturization while reducing noise through the piezoelectric effect
Solution Approach 2:
The patent uses mechanical vibration of the suspension plate at resonant frequency to generate acoustic waves for fluid transport. By operating at resonance, the device achieves efficient fluid pumping with minimal energy input and reduced noise, enabling compact design suitable for portable applications
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device achieves a slim, silent, and power-saving design, suitable for portable and wearable applications, with improved flowrate and pressure maintenance, and reduced noise and defectiveness.
Implementation Method 1
the piezoelectric actuator 12 is actuated by an applied voltage, the suspension plate 121 of the piezoelectric actuator 12 is vibrated along a vertical direction in a reciprocating manner
Implementation Method 2
the thickness of the adhesive layer 13 can be increased... The increase of the thickness of the adhesive layer 13 can assist in absorbing vibration energy and reduce noise
Implementation Method 3
a compressible chamber 10 is defined between the resonance plate 142 and the piezoelectric actuator 12... As the volume of the compressible chamber 10 shrinks, the fluid exits through the first perforation 111
Data Source
Figure 1A
Figure 1B
Figure 2A
AI summary
A miniature fluid control device (1) includes a piezoelectric actuator (13), a gas collecting plate (16) and a base (10). The piezoelectric actuator (13) includes a suspension plate (130), an outer frame (131), at least one bracket (132) and a piezoelectric ceramic plate (133). The suspension plate (130) is a square plate. The outer frame (131) is arranged around the suspension plate (130). A surface of the outer frame (131) and a surface of the suspension plate (130) are coplanar with each other. The gas collecting plate (16) is a frame body with an accommodation space (16a). The base (10) includes a gas inlet plate (11) and a resonance plate (12). The base (10) is disposed within the accommodation space (16a) to seal the piezoelectric actuator (13). An adhesive layer (136) is arranged between the second surface (131a) of the outer frame (131) of the piezoelectric actuator (13) and the resonance plate (12). Consequently, a depth of a compressible chamber (121) between the piezoelectric actuator (13) and the resonance plate (12) is maintained.