Fluid Control Apparatus Plural-Line Passage Block Design
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Solution Overview
Problem
Conventional fluid control apparatuses for semiconductor fabrication require a large number of components and are cumbersome to alter when increasing or decreasing the number of lines, due to the need for numerous block joints and seals.
Innovation Solution
The apparatus employs plural-line passage blocks with longitudinal and transverse passages to connect multiple fluid control devices, reducing the number of components and allowing for simpler adjustments by using a combination of plural-line and single-line passage blocks, along with inverted U-shaped pipes for easy configuration.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If conventional block joints with V-shaped passages are used to connect adjacent fluid control devices, then the fluid control devices can be connected, but a large number of block joints and seals are required, increasing device complexity
Solution Approach 1:
The patent combines multiple V-shaped passage block joints into a single integrated plural-line passage block that can connect fluid control devices across multiple lines simultaneously. This merging eliminates the need for multiple separate block joints and reduces the number of seals required, directly resolving the technical contradiction between ease of connection and device complexity.
Solution Approach 2:
The plural-line passage block is designed to serve multiple functions: it can connect fluid control devices on a single line or across multiple lines, and can be configured with different numbers of passages (e.g., two-line, three-line, four-line blocks). This multi-functionality allows a single component type to replace multiple specialized components, reducing overall system complexity while maintaining operational flexibility.
2Ease of operation
If manifold block joints are disposed over all plurality of lines, then all lines can be connected, but the dimensions are predetermined and must be changed when the number of lines changes, reducing adaptability
Solution Approach 1:
The patent segments the manifold functionality into modular plural-line passage blocks that can be independently selected and combined. Instead of using a single large manifold block joint that covers all lines, the system uses multiple smaller passage blocks (e.g., two-line blocks, three-line blocks) that can be selectively assembled. This segmentation allows the number of lines to be easily adjusted by adding or removing passage blocks without changing the fundamental dimensions of the entire manifold.
Solution Approach 2:
The system transitions from a static, fixed-dimension manifold block joint to a dynamic configuration where the number and arrangement of passage blocks can be adjusted based on the required number of lines. This dynamic approach allows the fluid control apparatus to adapt to different operational requirements by reconfiguring the passage blocks, directly addressing the adaptability issue.
3Reliability
If each block joint connects to multiple fluid control devices requiring seals, then fluid-tight connections are achieved, but a large number of seals are required, increasing device complexity and maintenance burden
Solution Approach 1:
The patent merges multiple sealing interfaces into fewer sealing interfaces by integrating multiple passages into a single passage block body. Instead of having separate seals at each connection point between individual block joints and fluid control devices, the integrated passage block reduces the number of external sealing surfaces, thereby reducing the total number of seals required while maintaining fluid-tight connections through the internal passage structure.
Data Source
AI summary
A fluid control apparatus has a reduced number of components and enables simple alteration such as increasing or decreasing the number of lines. Chanel blocks on a lower stage include a plural-line (three-line) passage block disposed over a plurality of lines. The plural-line passage block receives an upper stage over three lines, with each of the lines including an inlet extension of a flow rate controller, and two inlet-side on-off valves arranged in series with the inlet extension. The plural-line passage block has longitudinal passages and transverse passages therein. The longitudinal passages are in communication with passages of the fluid control devices arranged in series per line. The transverse passages are in communication with passages of fluid control devices arranged in adjacent lines.