Fluid Control Device Preformed Substrate Alignment
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Solution Overview
Problem
Conventional fluid control devices face challenges in precisely aligning flat-plate structures, leading to assembling errors and reduced performance due to the difficulty in maintaining a specified gap between the piezoelectric actuator and substrate, especially in miniaturized components, which affects fluid transportation efficiency and generates noise.
Innovation Solution
A manufacturing method involving a deformable substrate and piezoelectric actuator with a preformed synchronously-deformed structure, where the flexible and communication plates are stacked and coupled with external forces to define a specified depth between the movable part and the vibration plate, reducing alignment errors and enhancing fluid transfer efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If flat-plate structures with certain rigidities are used for substrate and piezoelectric actuator, then structural strength is maintained, but alignment precision deteriorates making it difficult to maintain specified gap depth
Solution Approach 1:
The substrate is divided into a rigid portion and a flexible portion, allowing different regions to serve different functions. The rigid portion maintains structural strength while the flexible portion enables precise alignment and gap control through deformation.
Solution Approach 2:
The substrate transitions from a completely rigid flat-plate structure to a dynamic structure with flexible portions that can deform. This allows the substrate to adapt its shape during assembly to achieve precise alignment and maintain the specified gap depth between components.
2Volume of moving object
If miniaturized components are adopted for fluid control device development, then device elaboration and miniaturization are achieved, but difficulty of maintaining specified gap depth increases
Solution Approach 1:
The miniaturized substrate is segmented into rigid and flexible portions, enabling precise gap control in small-scale devices. The flexible portion can deform to compensate for alignment variations that are more critical in miniaturized components.
Solution Approach 2:
The substrate's physical parameters are changed by introducing flexible portions with different mechanical properties. This allows the substrate to change its shape and adapt the gap depth to the specified value, overcoming the difficulties of maintaining precision in miniaturized devices.
3Reliability
If gap depth is increased to prevent contact between piezoelectric actuator and other components, then component interference is reduced, but fluid transportation efficiency deteriorates
Solution Approach 1:
The flexible portion of the substrate dynamically adjusts the gap depth to the specified value, ensuring optimal fluid transportation efficiency while preventing component contact. The deformation capability allows the system to maintain the precise gap needed for both efficiency and reliability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method ensures precise alignment and reduced noise by maintaining a specified gap, enhancing fluid transportation efficiency and product quality, and is more user-friendly for miniaturized components.
Implementation Method 1
In response to an applied voltage, the piezoelectric actuator 102 is subjected to deformation and a fluid is driven to flow through various chambers of the fluid control device 100
Data Source
Figure 1A
Figure 1B
Figure 2
AI summary
A manufacturing method of a fluid control device (2) is provided. Firstly, a housing (26), a piezoelectric actuator (23) and a deformable substrate (20) are provided. The piezoelectric actuator (23) includes a piezoelectric element (233) and a vibration plate (230) having a bulge (230c). The deformable substrate (20) includes a communication plate (21) and a flexible plate (22) having a movable part (22a). Then, the flexible plate (22) and the communication plate (21) are stacked and coupled. A preformed synchronous deformation process is implemented by applying at least one external force to outer portion of the deformable substrate (20) to form a preformed synchronously-deformed structure. A force-exerting mark is formed on a surface of the preformed synchronously-deformed structure. Then, the housing (26), the piezoelectric actuator (23) and the deformable substrate (20) are sequentially stacked and coupled. The preformed synchronously-deformed structure is aligned with the bulge (230c) of the vibration plate (230). A specified depth (δ) is defined between the movable part (22a) and the bulge (230c) of the vibration plate (230).