Fluid Control Device With Segmented Flow Passages
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Solution Overview
Problem
Existing pressure-type flow controllers face challenges in precisely controlling flow rates across a wide range due to shared control valves and obliquely extending flow passages, leading to difficulties in alignment and compact design, particularly during switching between high and low flow rates.
Innovation Solution
A fluid control device with separate first and second flow passages, each equipped with independent fluid control units, control valves, and pressure sensors, allowing for precise pressure control and compact design by avoiding oblique flow passages and using resin control valves for airtightness.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single control valve is used for both high-flow and low-flow ranges with common flow passages, then device complexity is reduced, but flow rate control precision deteriorates during flow passage switching due to pressure control delays causing overshoot or undershoot
Solution Approach 1:
The patent divides the single control valve into two separate control valves (first control valve and second control valve), each independently controlling a separate flow passage (first flow passage and second flow passage). This segmentation allows independent pressure control in each flow passage, eliminating the pressure control delays and flow rate fluctuations that occur during switching in single-valve configurations.
2Manufacturing precision
If flow passages are provided to extend obliquely from the inflow port, then independent pressure control in each flow passage is achieved, but alignment difficulty for drilling increases
Solution Approach 1:
Instead of extending flow passages obliquely from the inflow port as in conventional designs, the patent inverts the approach by providing separate inflow ports (first inflow port and second inflow port) positioned adjacent to each other on the same surface. The flow passages then extend linearly from these adjacent inflow ports to their respective control valves and outflow ports, making alignment straightforward while maintaining independent pressure control capability.
3Manufacturing precision
If an oblique flow passage expanding in the width direction is provided, then independent flow control is achieved, but device width and length increase
Solution Approach 1:
The patent arranges the two flow passages in parallel along the length direction of the device, with each passage containing its control valve and restriction part in sequence. This linear arrangement along one dimension (length) avoids the need for oblique passages that would expand in the width direction, thereby achieving independent flow control while maintaining a compact device footprint.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables smooth fluid control during flow passage switching with reduced overshoot or undershoot, achieving precise flow rate control and a compact design by independent operation of flow passages and improved airtightness.
Implementation Method 1
a sealing member closing an aperture of the hole
Implementation Method 2
the upstream pressure and the flow rate are controlled using a control valve provided in common on the upstream side of the orifices
Data Source
AI summary
A fluid control device includes a main body block including a first flow passage, and a second flow passage, a first and second fluid control units installed on an installation surface of the main body block. The first and second flow passages include a first portion extending along a first direction and a second flow passage portion orthogonal to the first direction. The second portion is formed of a hole extending from a side surface of the main body block and a sealing member.