Fluid Controller Monitoring for Semiconductor Supply Line Abnormalities
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Solution Overview
Problem
In fluid supply lines for semiconductor manufacturing, individual fluid control devices are affected by the opening and closing operations of other devices and changes in flow rates, making it difficult to precisely monitor and control the entire system, which is insufficient for advanced semiconductor processes.
Innovation Solution
A fluid controller system that includes operation information acquisition mechanisms, identification information storage, and communication processing means to transmit data from multiple fluid control devices to an external terminal, allowing for the discrimination of abnormalities and analysis of operations across the entire fluid supply line.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple fluid control devices are operated in a fluid supply line, then the system can meet the demands of advanced semiconductor manufacturing processes, but it becomes difficult to precisely monitor and control the entire system due to mutual interference and flow rate changes
Solution Approach 1:
The system divides the fluid supply line into multiple segments, each monitored by dedicated detection units. Each fluid control device is equipped with or associated with specific operation information acquisition mechanisms that independently monitor local conditions, allowing precise monitoring of each segment while maintaining overall system control.
Solution Approach 2:
The system implements feedback mechanisms where operation information acquisition mechanisms continuously monitor the state of each fluid control device and transmit this information to a central management unit. The management unit analyzes the collected data and can adjust device operations to compensate for mutual interference and maintain precise control throughout the system.
2Ease of operation
If individual fluid control devices are monitored separately, then each device can be controlled, but the entire fluid supply line cannot be precisely monitored due to lack of system-wide coordination
Solution Approach 1:
The system merges individual device monitoring capabilities with centralized management. Operation information acquisition mechanisms at each device level collect local data, which is then transmitted and integrated by a central management unit. This creates a unified view of the entire fluid supply line while preserving individual device control capabilities.
Solution Approach 2:
The management unit serves multiple functions: it collects operation information from all fluid control devices, analyzes system-wide patterns, identifies abnormalities, and coordinates control actions. This multi-functional approach enables both individual device monitoring and comprehensive system-wide oversight through a single integrated platform.
3Device complexity
If fluid control devices operate independently, then device simplicity is maintained, but system-level abnormalities cannot be discriminated
Solution Approach 1:
The management unit acts as an intermediary between simple individual fluid control devices and system-level monitoring requirements. Each device maintains its simplicity with basic operation information acquisition mechanisms, while the management unit performs complex analysis by collecting and processing data from all devices to identify system-wide abnormalities that individual devices cannot detect alone.
Data Source
AI summary
An entire fluid supply line or an entire fluid controller constituted by a plurality of fluid control devices is precisely monitored.A fluid controller G accumulating and having a plurality of fluid control devices A. The fluid control devices A include an operation information acquisition mechanism acquiring an operation information in the fluid control devices, an identification information storage 71 storing a self-identification information, and a communication processing unit 72 transmitting the operation information acquired by the operation information acquisition mechanism to an external terminal with the self-identification information stored in the identification information storage 71 at different timings for each of the fluid control devices A.