Fluid Controller Anomaly Detection via Pressure Sensor

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Solution Overview

Problem

Existing fluid leakage detection technologies in semiconductor manufacturing struggle to detect minute leaks, especially when leaks are slight, due to limitations in pressure sensing, responsiveness to specific fluids, and interference from purge gases or ultrasonic wave attenuation.

Innovation Solution

A fluid controller anomaly detection device equipped with a pressure sensor, a detachable mechanism to fix the sensor to a leak port, and a processing module that compares detected pressure values to thresholds, correcting for driving pressure and open/close operations, and communicates results to a server for remote monitoring.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If a movable member is used to detect fluid leakage by pressure, then the detection mechanism is simple, but slight leaks cannot be detected when the movable member does not move sufficiently

Engineering Contradiction:

Improvedetection mechanism simplicityVSAvoidleak detection sensitivity

Core Design Contradiction:

Device complexityVSMeasurement precision

Solution Approach 1:

The patent replaces the mechanical movable member detection system with a pressure sensor-based detection system. The pressure sensor directly measures pressure changes in the closed space caused by fluid leakage, eliminating the need for mechanical movement and providing more sensitive detection of slight leaks while maintaining simple device structure.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Reliability

If a leak detection member sensitive to specific fluid is used, then the detection is fluid-specific, but slight leaks may be missed due to dilution with purge gas

Engineering Contradiction:

Improvefluid-specific detection accuracyVSAvoiddetection sensitivity for slight leaks

Core Design Contradiction:

ReliabilityVSMeasurement precision

Solution Approach 1:

The patent replaces fluid-specific chemical detection members with a pressure sensor that detects leakage through pressure changes. This physical detection method is not affected by dilution with purge gas, maintaining reliability for specific fluid detection while improving sensitivity for slight leaks.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Ease of operation

If ultrasonic waves are used to detect fluid leakage, then remote detection is possible, but slight leaks cannot be detected when ultrasonic waves are weak

Engineering Contradiction:

Improveremote detection capabilityVSAvoidleak detection sensitivity

Core Design Contradiction:

Ease of operationVSMeasurement precision

Solution Approach 1:

The patent replaces ultrasonic wave detection with a pressure sensor-based detection system. The pressure sensor can be positioned close to the leak port through the detachable mechanism, providing high sensitivity for slight leaks while still enabling remote monitoring through the server connection, thus maintaining ease of operation without sacrificing detection precision.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

4Measurement precision

If a detachable mechanism is added to fix the pressure sensor to the leak port, then the leak port is blocked from external part improving detection accuracy, but the device complexity increases

Engineering Contradiction:

Improvepressure detection accuracyVSAvoidattachment mechanism complexity

Core Design Contradiction:

Measurement precisionVSDevice complexity

Solution Approach 1:

The detachable mechanism creates a sealed connection between the pressure sensor and the leak port, equalizing the pressure environment. This allows the pressure sensor to accurately measure the pressure inside the closed space by blocking the leak port from the external part, improving detection accuracy without requiring complex permanent attachment systems.

Inventive Principle:

Principle #12Equipotentiality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables reliable detection of slight fluid leaks and facilitates remote monitoring of multiple fluid controllers, improving the accuracy and efficiency of leak detection in semiconductor manufacturing environments.

Implementation Method 1

a pressure sensor for detecting a pressure in the closed space

Methodology Applied

Scientific EffectPressure detection:

Data Source

PatentUS11226257B2Anomaly detection device for fluid controller, anomaly detection system, anamoly detection method, and fluid controller

Publication Date: 2022.01.18 FUJIKIN INC

AI summary

A fluid controller is provided having a flow path through which a fluid can flow, a closed space separated from the flow path by an isolation member, and a leak port capable of communicating the closed space with an external part. An anomaly detection device for detecting an anomaly has a pressure sensor detachably fixed to the leak port, a pressure sensor for detecting the pressure in the closed space, a processing module for executing a predetermined information processing, and an detachable mechanism for blocking the leak port from the external part in the state of being fixed. The processing module determines an anomaly of the fluid controller by comparing a detection value detected by the pressure sensor to a predetermined threshold, and transmits a discrimination result of the anomaly of the fluid controller to a server.