Standardized Fluid Delivery Substrate With Transverse Manifold
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Solution Overview
Problem
Existing surface mount fluid delivery systems for semiconductor processing require complex and costly designs with interlocking flange structures and multiple port valves, making it difficult to remove and replace gas sticks without disrupting the entire gas panel.
Innovation Solution
The design minimizes fluid conduit ports and seals by using a standardized flow substrate with a transverse manifold connection conduit port and a welded assembly, allowing for secure fastening to a bracket that enables easy installation and removal of standardized fluid delivery sticks as a single unit, eliminating the need for interlocking flange structures and reducing the use of high-purity metals.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If interlocking flange structures and multiple port valves are used in surface mount fluid delivery systems, then the structural integrity and fluid control are improved, but the device complexity and manufacturing cost increase
Solution Approach 1:
The gas stick is divided into modular components (flow substrate, manifold, bracket) that can be independently manufactured and assembled. This segmentation reduces the complexity of individual parts while maintaining overall structural integrity through standardized connection interfaces.
Solution Approach 2:
The bracket serves multiple functions: it provides structural support, enables removal and replacement of the gas stick, and facilitates transverse manifold connections. This multi-functionality reduces the need for separate components, thereby reducing device complexity.
2Stability of the object's composition
If interlocking flange structures are used to secure flow substrates, then the structural stability is improved, but the ease of manufacture and assembly are worsened
Solution Approach 1:
The complex interlocking flange structures are extracted and replaced with a simpler bracket-based mounting system. The bracket provides structural stability through its design while being easier to manufacture and assemble than traditional flange structures.
Solution Approach 2:
The connection method is changed from mechanical interlocking flanges to a bracket system with fasteners. This parameter change in the connection mechanism simplifies manufacturing and assembly while maintaining structural stability through proper fastener selection and placement.
3Manufacturing precision
If multiple seals and complex port configurations are used, then the fluid delivery control is improved, but the manufacturing cost and machining complexity increase
Solution Approach 1:
The manifold is integrated with the flow substrate through direct mounting on the bracket, merging multiple fluid handling functions into a single assembly. This reduces the number of separate seals and connections required, thereby reducing manufacturing cost and machining complexity while maintaining fluid delivery control.
Solution Approach 2:
The design accepts the use of less expensive materials (such as aluminum or brass instead of high-purity metals) where appropriate, reducing manufacturing cost. The modular design allows for easy replacement of components, making the system more cost-effective overall.
4Ease of operation
If standardized flow substrates with transverse manifold connections are used, then the ease of operation and maintenance are improved, but the device complexity may increase
Solution Approach 1:
The flow substrates are pre-configured with standardized port arrangements and mounting features on the bracket. This preliminary standardization enables easy installation and removal of gas sticks without requiring complex alignment or customization, improving ease of operation and maintenance.
Solution Approach 2:
The standardized bracket design serves multiple purposes: structural support, alignment, and connection interfaces. This universality reduces the need for multiple specialized components, balancing ease of operation with acceptable device complexity.
Data Source
AI summary
A fluid delivery system that includes flow substrates and manifolds that minimize the number of fluid conduit ports and seals needed to build standardized fluid delivery sticks. Each flow substrate has a component attachment surface with one or more component conduit ports and an associated plurality of fastener apertures. Some flow substrates incorporate a transverse manifold connection conduit port on a surface opposite the component attachment surface. Fastener apertures associated with the transverse manifold connection conduit port are accessible adjacent to installed fluid handling components. Transverse connection between fluid delivery sticks use a welded assembly of fluid conduits to provide a transverse connecting lower layer which is sealingly retained by fasteners inserted from above through apertures associated with the transverse manifold connection conduit port. Flow substrates for each fluid delivery stick are fastened to a standardized bracket and each fluid delivery stick arrangement can be assembled and tested as an integrated subassembly.