Fluid Dispense Monitoring via Camera Image Analysis
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Solution Overview
Problem
Traditional substrate processing systems face challenges in monitoring and controlling fluid dispense processes, particularly in detecting the start of fluid dispensing and fluid puddle formation, which affects film thickness, uniformity, and critical dimension accuracy as geometries shrink.
Innovation Solution
The system utilizes camera images for real-time monitoring by analyzing hardware movement and fluid presence through intensity analysis, correlating arm movements with dispense recipes and detecting fluid edges on the substrate, enabling precise control of fluid dispense processes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If traditional monitoring methods are used, then system complexity is reduced, but measurement precision of fluid dispense process deteriorates
Solution Approach 1:
The system implements real-time feedback by continuously capturing images of the substrate during fluid dispense, analyzing hardware movement and fluid presence, and using this information to determine dispense start time and monitor process conditions, thereby improving measurement precision through automated visual feedback loops
Solution Approach 2:
The patent replaces traditional mechanical or contact-based monitoring methods with optical imaging and image analysis systems, using cameras to capture visual data and automated algorithms to analyze hardware movement and fluid presence, eliminating the need for complex mechanical sensors while improving measurement accuracy
2Manufacturing precision
If real-time image analysis is implemented, then manufacturing precision is improved, but loss of time increases
Solution Approach 1:
The system performs preliminary action by capturing images continuously during the fluid dispense process rather than requiring post-process analysis, enabling real-time determination of dispense start time and continuous monitoring of film formation, which improves manufacturing precision without significant time penalty
Solution Approach 2:
The patent uses optical copying by capturing visual images of the actual fluid dispense process on the substrate, creating a digital representation that can be analyzed automatically to determine dispense parameters and monitor film thickness, replacing time-consuming physical measurements with rapid image-based analysis
3Reliability
If automated image analysis is used, then reliability of process monitoring is improved, but difficulty of detecting and measuring increases
Solution Approach 1:
The system exploits color changes and optical property changes of the fluid as it is dispensed onto the substrate, using image analysis to detect variations in color, intensity, or optical characteristics that indicate fluid presence and progression, thereby improving reliability of detection while managing the complexity of measuring subtle visual changes
Data Source
AI summary
Camera images are utilized to provide information regarding characteristics of in a fluid dispense system. Camera images may be utilized to identify the movement of the hardware of a fluid dispense system. The movement of the hardware may be utilized to determine the beginning of a fluid dispense based upon a correlation between the hardware movement and a dispense time provided in a dispense recipe. The beginning of the fluid dispense may be detected by performing an image analysis on the camera images to detect the presence of the fluid in the camera image. The image analysis may involve an intensity analysis of the detected camera image. In another embodiment, the camera image is utilized to detect the edges of the fluid formed on substrate. The edges may be detected as a puddle formed prior to spinning the substrate and/or may be detected as the puddle spreads during spinning.