Fluid Dispenser Faceplate Cleaning with Suction and Meniscus Vibration
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Solution Overview
Problem
Existing cleaning methods for fluid dispensers in nano-fabrication processes that avoid physical contact with the faceplate can cause breakage of the meniscus associated with the nozzles, leading to nozzle outages and production interruptions.
Innovation Solution
A non-contact cleaning method using a suction apparatus that applies a suction force and vibrates the menisci of the nozzles to remove accumulated material while maintaining the meniscus integrity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a suction apparatus is used to clean the faceplate without physical contact, then cleaning effectiveness is improved, but the meniscus may break causing nozzle outages
Solution Approach 1:
The patent applies mechanical vibration to the meniscus through the suction apparatus to prevent breakage during cleaning. The vibration stabilizes the meniscus structure while the suction force removes accumulated material from the faceplate, resolving the contradiction between cleaning effectiveness and meniscus integrity.
Solution Approach 2:
The patent changes the parameters of the suction force by translating the suction apparatus from one end of the faceplate to the other, controlling the suction force magnitude and duration. This gradual parameter change allows effective cleaning while maintaining meniscus stability and preventing breakage.
2Productivity
If suction force is increased to remove accumulated material, then cleaning speed is improved, but meniscus breakage risk increases
Solution Approach 1:
The patent uses periodic action by translating the suction apparatus systematically from one end of the faceplate to the other, applying suction force in controlled intervals. This periodic application of suction force maintains cleaning speed while reducing the risk of meniscus breakage compared to continuous high-force suction.
Solution Approach 2:
The patent applies partial action by focusing the suction force on specific regions of the faceplate at different times rather than applying maximum force to the entire faceplate simultaneously. This approach achieves effective cleaning of accumulated material while keeping the suction force below the threshold that causes meniscus breakage.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Prevents meniscus breakage during cleaning, ensuring consistent nozzle performance and reducing production disruptions in nano-fabrication processes.
Implementation Method 1
applying a suction force onto a surface of the faceplate using a suction apparatus
Implementation Method 2
vibrating a menisci of the portion of nozzles that are exposed to the suction force to remove at least a portion of the material accumulated on the faceplate
Data Source
AI summary
A method of cleaning a fluid dispenser for dispensing a material during non-contact maintenance of the fluid dispenser. The fluid dispenser including a plurality of nozzles disposed on a faceplate. The method including applying a suction force onto a surface of the faceplate using a suction apparatus, the suction apparatus being translated from one end of the faceplate to an opposite end of the faceplate such that a portion of nozzles from the plurality of nozzles are exposed to the suction force. The method continues by vibrating a menisci of the portion of nozzles that are exposed to the suction force to remove at least a portion of the material accumulated on the faceplate.