Non-linear Fluid Dispenser Pattern Segmentation
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Solution Overview
Problem
In nanoimprint lithography, unexpected variations in resist layer thickness lead to downstream process defects, such as decreased device performance and semiconductor chip yield, due to non-linear fluid dispenser responses and mechanical resonances between nozzles.
Innovation Solution
A method involving a control apparatus that divides the drop dispensing pattern into multiple sub-patterns to increase the distance between simultaneously fired nozzles, reducing mechanical resonances and achieving a more linear fluid dispenser response by dispensing each sub-pattern sequentially.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a fluid dispenser uses multiple nozzles to dispense drops in a dense pattern, then productivity increases, but mechanical resonances between nozzles cause non-linear response and thickness variation
Solution Approach 1:
The patent divides the original dense drop pattern into multiple sub-patterns with reduced density. Each sub-pattern contains fewer drops spaced farther apart, eliminating mechanical resonances between simultaneously fired nozzles. The control apparatus sequences the dispensing of these sub-patterns over multiple passes, maintaining productivity while achieving linear fluid dispenser response and uniform resist layer thickness.
2Loss of time
If drops are dispensed in a single dense pattern, then manufacturing time is reduced, but non-linear fluid dispenser response causes unexpected thickness variations
Solution Approach 1:
The patent implements periodic dispensing by dividing the drop pattern into multiple sub-patterns that are dispensed in sequence across different passes. This periodic action allows the fluid dispenser to operate in its linear response range during each pass, while the cumulative effect of multiple passes achieves the desired full coverage without triggering non-linear responses or mechanical resonances.
3Productivity
If nozzles are positioned close together for high-resolution patterning, then pattern density increases, but mechanical resonances between adjacent nozzles cause thickness variation
Solution Approach 1:
The patent segments the high-density drop pattern into multiple lower-density sub-patterns. During each pass, nozzles fire with sufficient spacing to avoid mechanical resonances, ensuring consistent thickness. The segmentation allows high-resolution patterning to be achieved through multiple sequential passes rather than a single high-density pass that would trigger resonances.
Data Source
AI summary
A method of controlling a control apparatus for use with a fluid dispenser having a plurality of nozzles includes obtaining, dividing, and substituting. A drop pattern is obtained as data for use in dispensing drops onto a substrate from the plurality of nozzles of the fluid dispenser. The obtained drop pattern is divided into a plurality of drop patterns based on a distance between drops of the obtained drop pattern. The plurality of drop patterns are substituted in place of the obtained drop pattern to dispense the drops onto the substrate from the fluid dispenser.