Fluid-Driven Optical Alignment Device for Semiconductor Inspection
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Solution Overview
Problem
Existing optical devices face challenges in achieving high alignment accuracy for optical elements, which is crucial for precise observation and defect inspection in semiconductor manufacturing, as current methods are either complex or inefficient in adjusting optical elements for varying defect sizes and types.
Innovation Solution
The alignment device employs a combination of fluid-driven mechanical units and elastomeric forces to precisely adjust optical elements, allowing for balanced pushing and elastomeric forces in multiple directions to optimize the position of optical elements, thereby improving alignment accuracy without complicating the structure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional mechanical adjustment methods are used for optical elements, then the structure remains simple, but alignment accuracy is insufficient
Solution Approach 1:
The patent uses pneumatic actuators (driven by fluid pressure) to replace conventional mechanical adjustment mechanisms. The first and second driving units, driven by fluid pressure, apply pushing forces to the first and second holding portions respectively, enabling precise positioning of the optical element through pneumatic control rather than complex mechanical linkages.
Solution Approach 2:
The patent employs pressure regulators to dynamically adjust the fluid pressure supplied to the driving units. By changing the pressure parameter, the system can precisely control the position of the optical element in multiple directions, achieving high alignment accuracy through parameter modulation rather than mechanical reconfiguration.
Solution Approach 3:
The patent divides the positioning function into multiple independent driving units (first driving unit for the first holding portion, second driving unit for the second holding portion), each controlled by separate pressure regulators. This segmentation allows independent adjustment in different directions, achieving precise alignment without requiring a single complex mechanical mechanism.
2Adaptability or versatility
If fixed positioning methods are used for optical elements, then the structure remains simple, but adaptability to varying defect sizes and types is poor
Solution Approach 1:
The patent transforms the static positioning system into a dynamic one by using fluid-pressure-driven actuators with adjustable pressure regulators. The optical element can be dynamically repositioned in multiple directions by adjusting fluid pressure, enabling adaptation to various defect sizes and types without requiring multiple fixed positioning mechanisms.
Solution Approach 2:
The patent creates a universal positioning system where the same pneumatic driving units and pressure regulators can adjust the optical element's position in multiple directions (first direction and second direction intersecting with the first). This multi-functional capability allows a single mechanism to handle various inspection requirements rather than requiring separate mechanisms for each defect type.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enhances alignment accuracy, enabling more efficient defect inspection and observation by allowing for precise adjustments of optical elements in response to varying defect sizes and types, improving the overall performance of optical devices.
Implementation Method 1
The first driving unit is driven by a pressure of a fluid. The first driving unit applies a pushing force in the first direction to the first holding portion.
Implementation Method 2
The second driving unit is driven by a pressure of a fluid. The second driving unit applies a pushing force in the second direction to the second holding portion.
Implementation Method 3
The first optical element has a position adjusted by a balance between the pushing force by the first driving unit and an elastomeric force in which at least one of the first holding portion and the first member elastically deforms in the first direction
Implementation Method 4
The first optical element has a position adjusted by a balance between the pushing force by the second driving unit and an elastomeric force in which at least one of the second holding portion and the second member elastically deforms in the second direction
Data Source
AI summary
To improve alignment accuracy of an optical element. An alignment device includes an optical element, a base portion that holds the optical element and is supported in a state movable in an X-direction and a Y-direction intersecting with the X-direction, a mechanical driving unit driven by a pressure of a fluid, a member in contact with the base portion pushed by the mechanical driving unit, a stage portion that holds the member and is supported in a state movable in the Y-direction, the mechanical driving unit driven by a pressure of a fluid, and a member in contact with the stage portion pushed by the mechanical driving unit. The optical element has a position: adjusted by a balance between the pushing force by the mechanical driving unit and an elastomeric force in which at least one of the base portion and the member elastically deforms in the X-direction; and adjusted by a balance between the pushing force by the mechanical driving unit and an elastomeric force in which at least one of the stage portion and the member elastically deforms in the Y-direction.