Fluid Ejection Device Nozzle Plate Sagging Prevention
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Solution Overview
Problem
Current fluid ejection devices face issues with nozzle plate sagging, fluid ejection misdirection, lamination failure, and mechanical weakness due to large and long fluid through vias, which affect printing resolution and device longevity.
Innovation Solution
The design involves a substrate with fluid flow channels and vias etched at controlled rates, with isotropically etched cavities for fluid communication, and a photo-imaged nozzle plate supported by a flow feature layer, reducing the need for large vias and enhancing mechanical strength and adhesion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If large and long fluid through vias are used to feed fluid to firing chambers, then fluid delivery is achieved, but nozzle plate sags and loses planarity causing ejection misdirection
Solution Approach 1:
The patent segments the fluid delivery path by introducing intermediate fluid distribution channels in the substrate that collect fluid from multiple smaller via openings. This distributes the fluid load across multiple support points rather than requiring large continuous via structures, thereby maintaining nozzle plate planarity while achieving complete fluid delivery to all firing chambers.
2Manufacturing precision
If nozzle plate thickness is reduced to achieve higher printing resolutions, then spatial density of nozzles increases, but mechanical strength and fluid resistance of the nozzle plate decrease
Solution Approach 1:
The patent employs a composite structure where a thin photoimaged nozzle plate is laminated to a flow feature layer that is bonded to a rigid substrate. This composite construction allows the nozzle plate to be extremely thin (enabling high printing resolution) while the underlying flow feature layer and substrate provide the necessary mechanical strength and fluid resistance.
3Productivity
If photoimaged nozzle plate process is used instead of polyimide-based plates, then turnaround time is reduced and development cost is lowered, but processing window for thermal processes becomes narrow due to low glass temperature
Solution Approach 1:
The patent performs lamination of the photoimaged nozzle plate to the flow feature layer before subsequent thermal processing steps. This preliminary bonding action prevents the thin nozzle plate from sagging during later thermal processes, enabling the use of photoimaged plates with narrow processing windows while maintaining manufacturing efficiency.
4Manufacturing precision
If thin nozzle plate is used over large fluid through vias, then higher spatial density of nozzles is achieved, but adhesion between flow feature layer and nozzle plate deteriorates
Solution Approach 1:
The patent introduces an intermediate flow feature layer that bonds the thin nozzle plate to the substrate. This additional layer provides extended bonding area and improved mechanical interlocking, compensating for the reduced contact area between the thin nozzle plate and the substrate that would otherwise occur when using large fluid through vias.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration prevents nozzle plate sagging, improves printing resolution, and extends device life by maintaining planarity and adhesion, while reducing fluid interaction and enhancing mechanical integrity.
Implementation Method 1
Each fluid flow channel of the at least one fluid flow channel is configured within the bottom portion by etching the bottom portion at a first predetermined etching rate. Each fluid flow via of the plurality of fluid flow vias is configured within the top portion by etching the top portion at a second predetermined etching rate.
Implementation Method 2
Each fluid flow via of the plurality of fluid flow vias is further configured to be in fluid communication with a corresponding fluid flow channel of the at least one fluid flow channel through an isotropically etched cavity configured below the each fluid flow via and fluidically coupled to the corresponding fluid flow channel.
Implementation Method 3
a flow feature layer configured over the substrate. The flow feature layer includes flow features (fluid chambers and fluid channels)
Implementation Method 4
photoimaged nozzle plate (PINP) based process proceeds in the wafer level to lithographically form fine nozzles on a laminated nozzle plate dry film
Data Source
AI summary
Disclosed is a fluid ejection device for an inkjet printer that includes a substrate having at least one fluid flow channel configured within a bottom portion of the substrate. Each fluid flow channel of the at least one fluid flow channel is configured by etching the bottom portion. The substrate also includes a plurality of fluid flow vias configured within a top portion of the substrate. Each fluid flow via of the plurality of fluid flow vias is configured by etching the top portion. The each fluid flow via is further configured to be in fluid communication with a corresponding fluid flow channel through an isotropically etched cavity configured below the each fluid flow via and fluidically coupled to the corresponding fluid flow channel. The fluid ejection device also includes a flow feature layer and a nozzle plate. Further disclosed are methods for fabricating fluid ejection devices.