Fluid Handling Structure for Gas Phase Deposition
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Gas phase deposition techniques face challenges in achieving uniform gas flow distributions due to manufacturing tolerances in slit widths, leading to non-uniform layer thickness and limited upscalability in atmospheric pressure large area systems like ALD and CVD.
Innovation Solution
A fluid handling structure with an elongated slit and a series of nozzles, where the nozzles provide a higher flow resistance than the slit, forming jet flows that impinge on impingement surfaces to achieve a uniform flow discharge, reducing sensitivity to manufacturing tolerances and enhancing flow uniformity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If narrow slits with high flow restriction are used to achieve precursor separation and controlled gas flow, then flow control is improved, but manufacturing tolerances cause significant non-uniform flow distribution
Solution Approach 1:
The single narrow slit is segmented into multiple nozzles arranged in an array. Each nozzle has a larger diameter than the original slit width, making them less sensitive to manufacturing tolerances. The nozzles are distributed across the substrate width to maintain uniform flow distribution while improving manufacturability.
Solution Approach 2:
The design changes the critical dimension parameter from a narrow slit width (100 micrometer with 10 micrometer tolerance) to larger nozzle diameters. This parameter change reduces the relative impact of manufacturing tolerances on flow uniformity while maintaining the required flow restriction through the nozzle array configuration.
2Productivity
If multiple ALD slot pairs are used to enhance throughput, then productivity is improved, but flow uniformity across multiple slots becomes difficult to maintain
Solution Approach 1:
The system is segmented into multiple independent nozzle arrays, each serving a specific slot. This segmentation allows each nozzle array to be optimized independently for its slot, maintaining flow uniformity across multiple slots while achieving high throughput through parallel operation.
3Reliability
If slit clearance is reduced to improve flow restriction, then flow control is improved, but manufacturing tolerances have a larger impact on flow distribution
Solution Approach 1:
The design changes the critical dimension from a small clearance (100 micrometer) to larger nozzle diameters. The flow restriction is achieved not by reducing the opening size but by using an array of nozzles with optimized diameter and spacing, reducing sensitivity to manufacturing tolerances.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables a more uniform fluid distribution during gas phase deposition, reducing the impact of manufacturing tolerances and improving the homogeneity of layer deposition, even across large substrate widths.
Implementation Method 1
the series of nozzles are adapted to form a series of jet flows directed towards one or more impingement surfaces of the structure when pressurized fluid is transmitted through the flow path
Implementation Method 2
the series of nozzles are configured to provide a larger flow resistance than the elongated slit
Data Source
AI summary
A fluid handling structure for a gas phase deposition apparatus, the structure defining a flow path with an inlet and an outlet for transmitting pressurized fluid from said inlet to the outlet, wherein the structure includes an elongated slit and a series of nozzles through which pressurized fluid is allowed to enter the elongated slit, the inlet being upstream the series of nozzles, and wherein the outlet is formed downstream at a gap opening of the elongated slit allowing pressurized fluid to discharge from the elongated slit towards a substrate, wherein the series of nozzles are configured to provide a larger flow resistance than the elongated slit, and wherein the series of nozzles are adapted to form a series of jet flows directed towards one or more impingement surfaces of the structure when pressurized fluid is transmitted through the flow path.