Fluid Supply Heat Recovery With Gravity-Assisted Return

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Solution Overview

Problem

Existing fluid supply systems in semiconductor manufacturing face inefficiencies in heating and recovering fluids, particularly requiring external power for fluid transfer post-heating, which complicates the process and increases energy consumption.

Innovation Solution

A fluid supply system design that includes a heat exchanger positioned higher than the fluid recovery tank, utilizing gravity-assisted fluid transfer and incorporating traps and bypass pipes to manage fluid state changes, enabling efficient heat exchange and recovery without external power.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of energy

If a heat exchanger is used to heat the second fluid with the first fluid, then energy efficiency is improved through heat recovery, but the system complexity increases due to additional components and vertical level requirements

Engineering Contradiction:

Improveenergy efficiencyVSAvoidsystem complexity

Core Design Contradiction:

Loss of energyVSDevice complexity

Solution Approach 1:

The heat exchanger is positioned at a higher vertical level than the first fluid recovery tank, utilizing the vertical dimension to enable gravity-assisted fluid flow. This spatial arrangement allows the system to recover heat while using gravity to naturally circulate the first fluid from the heat exchanger back to the recovery tank, reducing the need for additional pumping components and simplifying the overall system architecture.

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The system uses the thermal energy of the first fluid itself to heat the second fluid, and then relies on gravity to return the cooled first fluid to the recovery tank without requiring external power. The heat exchanger design allows the first fluid to serve its own cooling and circulation needs, creating a self-sustaining heat recovery loop that minimizes external energy input.

Inventive Principle:

Principle #25Self-service

2Reliability

If external power is used to transfer fluid after heating, then fluid transfer reliability is improved, but energy consumption increases

Engineering Contradiction:

Improvefluid transfer reliabilityVSAvoidenergy consumption

Core Design Contradiction:

ReliabilityVSUse of energy by moving object

Solution Approach 1:

The system counteracts the need for powered fluid transfer by using gravity as the driving force. The heat exchanger is positioned at a higher elevation than the recovery tank, creating a gravitational potential difference that naturally drives the first fluid downward through gravity flow. This eliminates or reduces the need for external pumping power while maintaining reliable fluid transfer, as gravity provides a consistent and dependable driving force.

Inventive Principle:

Principle #8Anti-weight (Counterweight)

3Ease of operation

If the heat exchanger is positioned at a higher vertical level than the recovery tank, then gravity-assisted fluid transfer is achieved, but the installation space requirements increase

Engineering Contradiction:

Improvefluid transfer operationVSAvoidvertical space requirement

Core Design Contradiction:

Ease of operationVSLength of stationary object

Solution Approach 1:

The patent extracts and utilizes the gravitational force acting on the first fluid by positioning the heat exchanger at a higher vertical level than the recovery tank. This extraction of gravitational potential energy enables automatic fluid circulation without external power, simplifying operation while the vertical arrangement is optimized to minimize space requirements through compact heat exchanger design and efficient use of vertical clearance.

Inventive Principle:

Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system effectively heats and recovers fluids with reduced energy consumption by leveraging gravity and trap designs, optimizing fluid transfer and state management, thereby enhancing operational efficiency and reducing power requirements.

Implementation Method 1

a heat exchanger configured to exchange heat between the first fluid and the second fluid

Methodology Applied

Scientific EffectHeat exchange: Heat Exchanger

Implementation Method 2

heating a second fluid by using thermal energy of a first fluid

Methodology Applied

Scientific EffectThermal energy transfer: Conduction (thermal)

Implementation Method 3

The heat exchanger may be disposed at a vertical level higher than a vertical level of the first fluid recovery tank

Methodology Applied

Scientific EffectGravity: Gravitation

Data Source

PatentUS12455117B2Fluid supply system

Publication Date: 2025.10.28 SAMSUNG ELECTRONICS CO LTD

AI summary

A fluid supply includes a first fluid source configured to supply a first fluid, a second fluid source configured to supply a second fluid, a heat exchanger configured to exchange heat between the first fluid and the second fluid, a first fluid recovery tank operably connected to the heat exchanger to recover the first fluid that has passed through the heat exchanger, and a first transfer pipe configured to transfer the first fluid from the first fluid source to the first fluid recovery tank via the heat exchanger. A first fluid moving tube of the heat exchanger includes a first fluid inlet through which the first fluid is injected and a first fluid outlet through which the first fluid is discharged. The first fluid inlet is disposed at a level higher than the level of the first fluid outlet in the direction of gravity.