Fluid heating device
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Solution Overview
Problem
Current methods for heating deionized water in semiconductor manufacturing face challenges in efficiently changing the temperature setpoint from high to low, leading to energy and water wastage, as they lack a cooling function and require complete discharge and reheating of the water.
Innovation Solution
A fluid heating device with a tank, pump, heater, temperature sensors, and valves that control the supply and discharge of fluid based on temperature, allowing for partial discharge and supply of unheated fluid to adjust the temperature setpoint without fully replacing the heated water, thereby minimizing energy and water usage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If the temperature setpoint of heated deionized water is changed from high to low, then the temperature can be adjusted, but all heated water must be discharged and reheated, causing energy and water wastage
Solution Approach 1:
The invention extracts only the necessary amount of heated water from the storage tank to adjust the temperature setpoint, rather than discharging all heated water. The controller calculates and controls the discharge amount based on the temperature difference, extracting just enough unheated water to achieve the desired temperature change, thereby preserving the majority of heated water and reducing energy waste.
Solution Approach 2:
The invention changes the parameter of discharge amount from fixed (all water discharged) to variable (calculated amount discharged). The controller dynamically adjusts the discharge amount based on the temperature setpoint change, water level, and temperature difference, optimizing energy consumption by discharging only the necessary amount of water for temperature adjustment.
2Temperature
If the temperature setpoint of heated deionized water is changed from high to low, then the temperature can be adjusted, but all heated water must be discharged and replaced, causing water wastage
Solution Approach 1:
The invention extracts only the necessary amount of heated water from the storage tank to adjust the temperature setpoint, rather than discharging all heated water. The controller calculates and controls the discharge amount based on the temperature difference, extracting just enough unheated water to achieve the desired temperature change, thereby preserving the majority of heated water and reducing energy waste.
Solution Approach 2:
The invention changes the parameter of discharge amount from fixed (all water discharged) to variable (calculated amount discharged). The controller dynamically adjusts the discharge amount based on the temperature setpoint change, water level, and temperature difference, optimizing energy consumption by discharging only the necessary amount of water for temperature adjustment.
3Stability of the object's composition
If deionized water is discharged continuously to maintain temperature, then temperature stability is maintained, but energy is wasted due to continuous heating and discharge
Solution Approach 1:
The invention enables the system to self-regulate temperature by automatically controlling the discharge of unheated water based on detected temperature changes. When the temperature drops below the setpoint, the controller discharges a calculated amount of unheated water and replenishes with fresh water, allowing the heater to restore temperature efficiently without continuous discharge, thus reducing energy consumption while maintaining stability.
Solution Approach 2:
The invention implements a feedback control mechanism where the temperature detector continuously monitors the water temperature in the storage tank and provides feedback to the controller. The controller adjusts the discharge valve and water supply based on this feedback, maintaining temperature stability within a predetermined range while minimizing energy waste by discharging only when and how much is necessary.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces energy consumption and water wastage by allowing for precise temperature control and minimizing the amount of heated water discharged, enabling efficient temperature adjustments and reducing the time required to reach the new setpoint.
Implementation Method 1
a heater configured to heat the delivered fluid to a predetermined temperature
Implementation Method 2
a temperature sensor configured to detect a temperature of the heated fluid
Data Source
AI summary
A fluid heating device includes: a tank to store a fluid; a pump to deliver the fluid stored in the tank; a heater to heat the delivered fluid to a predetermined temperature; a return pipe to return the heated fluid to the tank; a fluid supply valve to supply an unheated fluid into the tank; a fluid discharge valve to discharge the heated fluid from the tank; a temperature sensor to detect a temperature of the heated fluid; and a temperature controller to control an opening degree of each of the fluid supply valve and the fluid discharge valve to control the temperature of the fluid stored in the tank. The temperature controller includes: a discharge opening-degree controller-to control the opening degree of the fluid discharge valve; and a supply opening-degree controller to control the opening degree of the fluid supply valve.