Fluid Control Leak Detection Using Dynamic Pressure Thresholds
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Solution Overview
Problem
Existing fluid leakage detection technologies in semiconductor manufacturing struggle to accurately detect slight leaks and distinguish them from normal operational changes in fluid control devices, often failing to respond to minute leaks due to pressure and fluid dilution issues.
Innovation Solution
A fluid control device equipped with a pressure sensor, an operation detecting mechanism, and a processing module that corrects threshold values based on detected pressures and operational data, allowing for precise abnormality detection and improved leak detection accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a pressure sensor is used to detect fluid leakage, then the detection capability is improved, but the ability to distinguish slight leaks from operational changes deteriorates due to threshold value inaccuracies
Solution Approach 1:
The patent applies parameter changes by dynamically adjusting the threshold value based on operational parameters such as fluid flow rate, temperature, and pressure. Instead of using a fixed threshold, the system modifies the threshold according to actual operating conditions, enabling accurate distinction between slight leaks and normal operational variations.
Solution Approach 2:
The patent implements feedback mechanisms where the detection results and operational parameters are continuously monitored and used to adjust the threshold value. The system compares detected pressure changes against dynamically updated thresholds and uses this information to refine future detections, creating a closed-loop system that improves reliability over time.
2Device complexity
If a movable member is used to detect leakage pressure, then the detection mechanism is simplified, but the ability to detect slight leaks deteriorates due to insufficient movement response
Solution Approach 1:
The patent replaces the mechanical movable member system with an electronic pressure sensor-based detection system. Instead of relying on physical movement of components to indicate leakage, the system uses electronic sensors to detect pressure changes and processes this data to identify leaks, significantly improving sensitivity to slight leaks while maintaining operational simplicity.
3Measurement precision
If leak detection members are made sensitive to specific fluids, then the detection accuracy for target fluids is improved, but the response to slight leaks deteriorates due to dilution with purge gas
Solution Approach 1:
The patent introduces an intermediary processing layer that analyzes pressure change patterns rather than relying directly on fluid-specific chemical sensitivity. The system detects leaks by monitoring characteristic pressure fluctuation patterns that occur during leakage events, which serves as an intermediary indicator that works effectively even when the leaked fluid is diluted with purge gas.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the detection of slight fluid leaks and distinguishes abnormal leaks from operational changes with high accuracy, ensuring reliable fluid control in semiconductor manufacturing processes.
Implementation Method 1
a pressure sensor detecting a pressure inside of the closed space
Data Source
AI summary
A fluid control device, capable of detecting leaks even if the leaks is slight, is provided. Further, a fluid leak abnormality is identified as a change accompanying an operation of the fluid control device and the fluid leaks is detected with high accuracy. A fluid control device, having a flow path and a closed space isolated from the flow path by a diaphragm and capable of detecting an abnormality, includes a pressure sensor detecting a pressure inside of the closed space, a processing module executing a predetermined information process, and an operation detecting mechanism detecting an operation of the fluid control device. The processing module executes a discriminating process discriminating abnormality of the fluid control device by comparing a detected value detected by the pressure sensor with a predetermined threshold value, and a correcting process correcting the predetermined threshold value in accordance with the operation of the fluid control device.