Flexible Fluid Line Position Sensing Inside 3D Hollow Structures
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Solution Overview
Problem
Existing methods for determining the position and movement of a flexible fluid line within a hollow structure during material removal machining are prone to inaccuracies due to slippage and unintended movement, leading to potential damage or cracking of the workpiece.
Innovation Solution
The method involves providing a marker on the flexible fluid line, such as fluorescent or magnetic nanoparticles, to enable contactless detection of its position and movement parameters, using sensors like cameras or Hall sensors, allowing precise determination of the fluid line's position and orientation within the hollow structure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the feed unit pushes the flexible fluid line along the machining front to maintain position, then the fluid line can be supplied to the ablation front, but slippage and unintended movement occur causing position shifts outside the tolerance range
Solution Approach 1:
A magnetic marker is introduced as an intermediary element attached to the flexible fluid line. This marker serves as a mediator between the fluid line and the detection system, enabling indirect but accurate position monitoring through magnetic field sensing without requiring direct mechanical contact or visual line-of-sight measurement.
Solution Approach 2:
The patent replaces mechanical position detection methods (such as optical cameras requiring line-of-sight or mechanical encoders) with a magnetic field-based detection system. Hall effect sensors detect the position of the magnetic marker through non-contact means, substituting mechanical measurement systems with field-based sensing that is immune to slippage and unintended movements.
2Measurement precision
If a camera is used to detect the end of the flexible fluid line, then position can be monitored, but detection is unreliable when the fluid line is inserted into the workpiece or obscured
Solution Approach 1:
The magnetic marker acts as an intermediary that can be detected through the workpiece material and fluid line sheath, serving as a reliable reference point that does not require direct visual access. The Hall effect sensor detects the magnetic field signature of this marker, enabling position determination regardless of whether the fluid line end is visible or inserted into the workpiece.
Solution Approach 2:
The patent substitutes optical detection (camera-based visual monitoring) with magnetic field detection. This replacement allows the system to detect the fluid line position through the workpiece material and surrounding media, overcoming the line-of-sight limitations and obscuration problems that plague optical methods.
3Reliability
If the distance between the fluid line end and ablation front is too small, then fluid flow can reach the ablation front, but heterogeneous flushing occurs causing blackening damage
Solution Approach 1:
The system continuously monitors the position of the flexible fluid line end relative to the ablation front using the magnetic marker and Hall effect sensor. This position feedback is used to control the feed unit, adjusting the fluid line position to maintain the optimal distance range that prevents both heterogeneous flushing and stagnant water conditions, thereby avoiding blackening damage and cracking.
4Reliability
If the distance between the fluid line end and ablation front is too large, then homogeneous flushing is avoided, but ablation occurs in stagnant water causing cracking
Solution Approach 1:
Position feedback from the magnetic marker and Hall effect sensor enables real-time control of the fluid line feed, maintaining the distance within the optimal range that ensures continuous fluid flow reaches the ablation front without creating stagnant water conditions, thus preventing cracking while avoiding heterogeneous flushing.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances the accuracy and robustness of determining the fluid line's position and movement, preventing damage and ensuring consistent fluid flow, thereby improving the material removal process.
Implementation Method 1
The method involves providing a marker on the flexible fluid line, such as fluorescent or magnetic nanoparticles, to enable contactless detection of its position and movement parameters
Implementation Method 2
using sensors like cameras or Hall sensors, allowing precise determination of the fluid line's position and orientation within the hollow structure
Data Source
Figure 1a~1b
Figure 2~4
AI summary
The invention relates to a method for determining at least one position parameter (P) and/or one movement parameter of a flexible fluid line (6) inserted into a hollow structure (2), in particular a three-dimensional hollow structure (2), which is formed during the material removal machining of a workpiece, preferably a substrate (1) for an optical element, in particular an EUV mirror. The method comprises: contactless detection of at least one marking (10) provided on the flexible fluid line (6), preferably on a sheath (12) of the flexible fluid line (6), and determination of the at least one position parameter (P) and/or movement parameter of the flexible fluid line (6) based on the detected marking (10). The invention also relates to a device for carrying out the method.