Fluid-Mediated Diffuse Scattering for Reflective Surface Inspection
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Solution Overview
Problem
The inspection of highly reflective surfaces, such as silicon wafers and PCBs, is challenging due to specular reflection, which causes surface glare and distortion, making it difficult to extract structural data from these surfaces.
Innovation Solution
The system temporarily alters the reflective properties of the surfaces from specular to diffuse by using a fluid stream to adsorb a material on the surface, enhancing diffuse scattering, which allows for clearer imaging of the reflective components.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If traditional optical inspection methods are used on highly reflective surfaces, then the inspection system is simple and cost-effective, but the image quality is poor due to surface glare and distortion from specular reflection
Solution Approach 1:
The patent introduces a mediator substance (such as a liquid or gas) between the optical inspection system and the highly reflective surface. This intermediary modifies the optical interaction by reducing specular reflection and enhancing diffuse scattering, allowing clear imaging without requiring complex illumination or camera arrangements. The mediator acts as a temporary interface that transforms the reflective properties of the surface during inspection.
Solution Approach 2:
The patent changes the optical parameters of the surface by applying a mediator that alters the reflection characteristics. By modifying the surface's reflective properties temporarily during inspection, the system achieves better image quality without permanent modification. This parameter change allows the surface to transition from highly specular to more diffuse reflection, enabling standard optical systems to capture clear images.
2Loss of information
If illumination and camera arrangements cover a broad angular spectrum to capture light from curved reflective surfaces, then structural data can be extracted, but the imaging modality becomes complex
Solution Approach 1:
The mediator substance fundamentally changes how light interacts with the curved reflective surface, allowing a single-angle camera to capture information that would otherwise require multi-angle illumination and imaging. The mediator reduces the angular sensitivity by enhancing diffuse scattering, so structural data can be extracted from a simplified single-viewpoint system rather than a complex multi-viewpoint system.
Solution Approach 2:
The patent extracts the function of multi-angle imaging by using the mediator to make single-angle imaging sufficient. Instead of implementing multiple illumination and camera systems to capture light from different angles, the mediator enables a single camera to effectively capture the necessary structural information by transforming the reflection characteristics.
3Measurement precision
If the surface is treated to enhance diffuse scattering, then imaging quality improves, but the surface properties are temporarily altered
Solution Approach 1:
The mediator is applied preliminarily and temporarily during the inspection process. This preliminary action modifies the surface properties only when needed for imaging, and the modification is reversible. The surface returns to its original state after the mediator is removed, ensuring no permanent damage or alteration while achieving improved imaging quality during the inspection window.
Solution Approach 2:
The patent implements temporary parameter changes in the surface's optical properties by applying the mediator. These parameter changes are controlled and reversible, allowing the surface to be in a favorable state for imaging only during the inspection process. The original surface properties are restored after inspection, maintaining the integrity and stability of the object's composition outside the inspection window.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables effective imaging and data extraction from highly reflective surfaces by reducing glare and distortion, improving the quality and resolution of the inspection process.
Implementation Method 1
deliver a fluid (e.g., gas and/or liquid) to the one or more reflective components of the sample via a fluid stream to temporarily cause adsorption of a material on a surface of the one or more reflective components of the sample
Data Source
AI summary
An inspection system for enhancing diffuse scattering from a sample during inspection of includes a stage and an optical sub-system, wherein the optical sub-system includes an illumination source, one or more optical elements, and a camera. The inspection system also includes one or more fluid delivery nozzles positioned proximate to the stage. The one or more fluid delivery nozzles are configured to deliver a fluid to the one or more reflective components of the sample via a fluid stream to temporarily cause adsorption of a material on a surface of the one or more reflective components of the sample to cause temporary enhancement of diffuse scattering from the one or more reflective components of the sample. The camera is configured to image the one or more reflective components of the sample during the temporary enhancement of diffuse scattering from the one or more reflective components of the sample.