Fluid Mixing Module With Perpendicular Inlets for Compact Delivery
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Solution Overview
Problem
Existing flow control devices in semiconductor chip fabrication face challenges in achieving efficient and homogeneous mixing of fluids due to increased component size reduction and tighter packaging requirements, necessitating improved functional performance and space efficiency.
Innovation Solution
A fluid delivery module with a mixing element that combines two or more fluids through a tubular body with perpendicular fluid inlets, ensuring complete mixing and predictable fluid behavior, integrated into a system with modular flow components for seamless integration and control.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of moving object
If component size is reduced to meet packaging density requirements, then packaging density is improved, but mixing efficiency and functional performance deteriorate
Solution Approach 1:
The mixing element utilizes three-dimensional flow paths within a compact tubular structure, allowing fluids to mix in multiple directions and dimensions simultaneously. The perpendicular arrangement of fluid inlets and the internal geometry of the tubular body create multi-dimensional mixing patterns that achieve thorough mixing within a reduced footprint, resolving the contradiction between small size and mixing efficiency.
2Area of moving object
If component size is reduced to meet packaging requirements, then packaging density is improved, but achieving homogeneous mixing becomes more difficult
Solution Approach 1:
The mixing element incorporates specific geometric features within the tubular body, including strategically positioned inlet openings and internal surface characteristics that create localized high-shear regions and enhanced mixing zones. These local structural qualities ensure homogeneous mixing is achieved throughout the fluid path, maintaining mixing precision even as the overall component size is reduced.
3Adaptability or versatility
If multiple flow control functions are integrated, then device functionality is improved, but device complexity increases
Solution Approach 1:
The mixing element serves multiple functions simultaneously: it acts as a fluid mixer, a flow distributor, and a potential flow control component. The tubular body with its specific geometry and inlet arrangements can perform mixing while also regulating flow distribution to multiple outlets. This multi-functionality reduces the need for separate components, thereby decreasing overall device complexity while maintaining versatile functionality.
Data Source
AI summary
Apparatuses for controlling fluid flow are important components for delivering process fluids for semiconductor fabrication. These apparatuses for controlling fluid flow are formed with a variety of fluid flow components, including fluid flow components for mixing fluid flows. Fluid flow components for mixing flows utilize mixing elements configured to receive flows of two or more process fluid flows via fluid inlets, mix the fluid flow within the mixing element, and deliver mixed fluid to a down-stream fluid flow component or an outlet of an apparatus for controlling fluid flow.