Fluid Delivery Module With Isolated Sensing for Precise Flow Measurement
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Solution Overview
Problem
Current flow control devices in semiconductor fabrication face challenges in achieving accurate measurement, fast response times, and compact packaging, which are essential for advanced semiconductor processing.
Innovation Solution
A fluid delivery module with a fluid flow component that includes a sensing element and sensor isolated from the process fluid, allowing for precise detection of fluid properties within the flow path, enabling improved control and measurement capabilities.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a sensor is directly exposed to process fluid for measurement, then measurement accuracy and response time are improved, but device complexity and packaging difficulty increase
Solution Approach 1:
A sensing element is introduced as an intermediary component between the process fluid and the sensor. The sensing element is in direct contact with the process fluid through a sensing port, while the sensor remains isolated from the fluid. This intermediary structure enables accurate measurement of fluid properties without requiring the sensor to be directly exposed to the process fluid, thereby maintaining measurement accuracy while reducing device complexity and packaging difficulty.
2Volume of moving object
If component size is decreased to meet packaging density requirements, then packaging efficiency is improved, but measurement precision and response time may deteriorate
Solution Approach 1:
The flow component is segmented into distinct functional modules: a sensing port for fluid access, a sensing element for direct fluid contact, a sensor for measurement, and a sensor housing for isolation. This segmentation allows each component to be optimized independently - the sensing element can be miniaturized for compact packaging while the sensor maintains its measurement precision capabilities in an isolated environment.
Solution Approach 2:
The sensing element serves as a miniaturized intermediary that bridges the small-scale flow path and the sensor. Even in compact components, the sensing element maintains sufficient interaction with the process fluid to enable accurate measurements, while the isolated sensor can be optimally sized for its measurement function without compromising overall component compactness.
3Reliability
If sensor is isolated from process fluid, then device reliability and ease of manufacture are improved, but measurement response time may worsen
Solution Approach 1:
The sensing element acts as a rapid-response intermediary that quickly transfers measurement information from the process fluid to the isolated sensor. The sensing element is positioned at the sensing port where it immediately contacts incoming fluid, enabling fast detection of fluid properties and rapid transmission of measurement data to the sensor, thus maintaining fast response time while preserving device reliability through sensor isolation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enhances measurement accuracy and response times while accommodating increasingly dense packaging requirements, supporting advanced semiconductor fabrication processes.
Implementation Method 1
The fluid flow component has a sensing element and a sensor isolated from the process fluid by the sensing element. The sensor is configured to detect a property of the process fluid within the flow path.
Data Source
AI summary
Apparatuses for controlling fluid flow are important components for delivering process fluids for semiconductor fabrication. These apparatuses for controlling fluid flow are formed with a variety of fluid flow components, including fluid flow components for measuring various properties of process fluids. Fluid flow components for measuring may be constructed to monitor properties such as temperature and pressure, and may do so via sensing elements which also serve to enclose a portion of a flow path within the fluid flow component.