Process Fluid Path Switching for Multi-Chamber Uniformity
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Solution Overview
Problem
In semiconductor processing, achieving uniform film deposition and etching across multiple processing chambers is challenging due to tolerance mismatches and clogged process fluid lines, leading to defects and decreased yield.
Innovation Solution
A computing device controls fluid flow by translating time values into recipe parameters to manage the duration of process fluid delivery to each processing chamber, diverting excess fluid to a foreline when not needed, thereby optimizing fluid distribution and reducing clogging.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If process fluid is continuously delivered to all processing chambers, then film deposition uniformity is maintained, but fluid line clogging increases and yield decreases
Solution Approach 1:
The system implements periodic action by cycling process fluid delivery between processing chambers and a divert foreline according to timed recipe parameters. Fluid is delivered to specific chambers only during required time windows, with diversion to foreline during non-use periods, preventing stagnation and clogging while maintaining deposition uniformity when fluid is actively delivered.
Solution Approach 2:
The system applies dynamics by dynamically switching fluid paths using valves controlled by recipe parameters. The fluid delivery configuration changes over time based on processing requirements, with the system adapting which chambers receive fluid and which are diverted to the foreline, optimizing both uniformity and preventing clogging.
2Device complexity
If a single process fluid delivery system is used for all chambers, then device complexity is reduced, but control precision over fluid distribution decreases
Solution Approach 1:
The system segments the fluid delivery control by dividing chambers into groups that can be independently controlled through valve configurations. While using a single shared fluid delivery infrastructure, the system creates separate controllable pathways to different chamber groups, enabling precise control over which chambers receive fluid at any given time without duplicating the entire delivery system.
Solution Approach 2:
The divert foreline acts as an intermediary element in the fluid delivery system. It provides an additional pathway that mediates between the single fluid source and multiple chambers, allowing the system to redirect fluid away from chambers that don't currently require processing while maintaining the simplicity of a shared delivery infrastructure.
3Manufacturing precision
If process fluid delivery time is extended to ensure complete coating, then film uniformity improves, but processing time and productivity increase
Solution Approach 1:
The system uses periodic action to deliver fluid to each chamber only during specific time windows defined by recipe parameters rather than continuously. This timed delivery ensures complete coating during the active period while reducing overall processing time by not maintaining fluid flow to all chambers simultaneously, thus improving productivity without sacrificing uniformity.
Solution Approach 2:
The system applies partial action by delivering fluid to only the necessary subset of chambers at any given time based on processing requirements. Rather than over-delivering to all chambers continuously, the system provides sufficient fluid delivery duration to achieve complete coating for active chambers while minimizing waste and processing time.
Data Source
AI summary
A method includes identifying time values for a length of time to carry out process fluid delivery within multiple processing chambers that concurrently process multiple substrates; translating each time value to a recipe parameter for execution of an operation of a processing recipe; and causing the operation to be performed using each recipe parameter as a control value to control valves of a fluid panel of the multiple processing chambers. For each processing chamber of the multiple processing chambers, selectively controlling process fluid flow to the process chamber for a first period of time corresponding to a time value of the set of time values and to a divert foreline of the process chamber for a second period of time.