Fluid-Permeable Substrate Holder for Region-Specific ALD Coatings

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Solution Overview

Problem

Conventional chemical deposition methods, such as ALD, fail to produce region-specific coatings on interlaced structures, limiting the ability to create medical devices like stents with distinct material properties for inner and outer surfaces.

Innovation Solution

A method involving a chemical deposition reactor with a fluid-permeable substrate holder allows for differential delivery of precursor chemicals to opposite surfaces of an interlaced substrate, enabling the formation of coatings with distinct compositions and properties on the first and second surfaces through Atomic Layer Deposition (ALD).

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If conventional ALD methods are used to deposit coatings on interlaced structures, then conformal coatings are produced on all surfaces, but region-specific coating capability is lost

Engineering Contradiction:

Improveregion-specific coating capabilityVSAvoidconformal coating uniformity

Core Design Contradiction:

Adaptability or versatilityVSEase of operation

Solution Approach 1:

The substrate holder is divided into multiple zones with different fluid permeability characteristics, allowing different precursor gases to reach different regions of the interlaced substrate. This segmentation enables region-specific coating while maintaining the conformal deposition mechanism in each zone.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Different regions of the substrate holder are designed with tailored fluid permeability to deliver specific precursor chemicals to specific areas. This creates local quality variations in the coating composition, enabling distinct material properties on different surfaces of the interlaced structure.

Inventive Principle:

Principle #3Local quality

2Adaptability or versatility

If precursor chemicals are delivered uniformly to all surfaces, then conformal coatings are achieved, but selective material deposition is prevented

Engineering Contradiction:

Improveselective material depositionVSAvoidcoating composition control

Core Design Contradiction:

Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The fluid-permeable substrate holder acts as an intermediary device that selectively transports different precursor chemicals to different regions. This mediator enables precise control over which materials are deposited on which surfaces, achieving selective material deposition with controlled composition.

Inventive Principle:

Principle #24Intermediary (Mediator)

3Adaptability or versatility

If traditional CVD methods are used, then coating deposition is achieved, but region-specific coating on interlaced structures is not possible

Engineering Contradiction:

Improveregion-specific coatingVSAvoidprocess complexity

Core Design Contradiction:

Adaptability or versatilityVSEase of manufacture

Solution Approach 1:

The fluid-permeable substrate holder automatically distributes precursor chemicals based on its inherent fluid permeability properties and the pressure gradients established during deposition. This self-service mechanism eliminates the need for complex external delivery systems, making region-specific coating achievable without excessive process complexity.

Inventive Principle:

Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables the creation of medical devices with region-specific coatings, allowing for desired physicochemical and biological functions, such as selective material deposition and distinct surface chemistries, enhancing their performance and application in medical fields.

Implementation Method 1

a substrate holder made of a fluid-permeable material, onto which an interlaced substrate is mounted such, that a first surface of the substrate faces the reaction space, and a second surface of the substrate is placed against the substrate holder

Methodology Applied

Scientific EffectFluid permeation: Permeation

Implementation Method 2

Chemical deposition methods, such as Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD), are extensively described in the art

Methodology Applied

Scientific EffectChemical vapor deposition: Chemical Vapour Deposition

Implementation Method 3

ALD is based on alternating self-saturative surface reactions, wherein different reactants (precursors) provided as molecular compounds or elements in a nonreactive (inert) gaseous carrier are sequentially pulsed into a reaction space accommodating a substrate

Methodology Applied

Scientific EffectAtomic layer deposition:

Data Source

PatentUS20230257870A1Coated items and manufacturing thereof

Publication Date: 2023.08.17 PICOSUN OY

AI summary

A method for manufacturing a coated item 10 in a chemical deposition reactor and a coated item produced by said method are provided. The method comprises deposition of a first coating on a first surface of the item 10, and/or deposition of a second coating on a second surface of said item.