Fluid Resistivity Probe for Real-Time Particle Contamination Monitoring
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Solution Overview
Problem
Particle contamination in process fluids during integrated circuit manufacturing leads to substrate warpage, electrical contact failures, and premature device failure due to the inability to effectively monitor and control particle contamination in real-time within process chambers.
Innovation Solution
A method and apparatus using a fluid resistivity measurement probe with a metal rod and coaxial ground electrode to measure the electrical resistivity of process fluids in-situ, allowing for real-time detection of contamination without requiring fluid samples, and triggering remedial actions when thresholds are met.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If traditional particle detection methods are used, then particle contamination can be detected, but real-time monitoring capability is lost due to sampling requirements
Solution Approach 1:
The patent replaces mechanical sampling systems with an electrical measurement system. Instead of physically collecting fluid samples for analysis, the invention uses a measurement probe with electrodes to directly measure electrical properties (conductivity or resistivity) of the process fluid in-situ. This substitution of mechanical sampling with electrical measurement enables continuous real-time monitoring while maintaining detection precision.
Solution Approach 2:
The patent introduces electrical conductivity/resistivity as an intermediary parameter to indirectly detect particle contamination. Rather than directly observing particles, the measurement probe detects changes in the electrical properties of the process fluid, which serve as a mediator indicating the presence and concentration of contaminants. This intermediary measurement approach enables real-time detection without direct particle observation.
2Measurement precision
If fluid samples are collected for analysis, then contamination levels can be measured, but process downtime increases due to sampling interruptions
Solution Approach 1:
The measurement probe performs self-service by directly measuring the process fluid within the process chamber without requiring external sampling equipment or personnel intervention. The probe continuously monitors fluid properties in-situ, eliminating the need to stop the process for sample collection and analysis, thereby maintaining process continuity and productivity.
Solution Approach 2:
The patent implements continuous measurement action by keeping the measurement probe permanently installed and operational within the process fluid stream. The probe continuously measures electrical properties without interruption, ensuring that contamination monitoring is an ongoing process rather than a periodic sampling activity, thus maintaining both measurement precision and process productivity.
3Measurement precision
If complex measurement systems are deployed, then detection accuracy improves, but device complexity and cost increase
Solution Approach 1:
The patent changes the measurement parameter from direct particle detection to electrical property measurement (conductivity or resistivity). By measuring a different physical parameter that correlates with particle contamination, the system achieves detection accuracy using simple electrical measurement circuits rather than complex optical or mechanical particle analysis equipment. This parameter change simplifies the overall device complexity while maintaining contamination detection capability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables real-time monitoring of process fluid properties, reducing downtime and improving control over critical dimensions and process yields by identifying and mitigating particle contamination within process chambers.
Implementation Method 1
determining an electrical resistivity of a process fluid
Data Source
AI summary
A method and apparatus for determining particle contamination of a process fluid is disclosed herein. In one example, a fluid resistivity measurement probe is provided. The system includes an upstream fluid conduit, a downstream fluid conduit, and a measuring section. The measuring section has a metal rod, and a ground electrode. The ground electrode surrounds and is coaxial with the metal rod. The upstream fluid conduit is coupled to a first end of the ground electrode. The downstream fluid conduit is coupled to a second end of the ground electrode. The metal rod and the ground electrode define a space therebetween. The space flows a fluid from the upstream fluid conduit to the downstream fluid conduit.