Integrated Fluid Sensor Chips for Flow and Composition Measurement
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Solution Overview
Problem
Existing hot film air mass meters require additional sensors to determine qualitative properties of fluid media, leading to increased costs and complexity.
Innovation Solution
A sensor system that integrates a second micro-electro-mechanical sensor chip within the electronics module to determine the qualitative composition of the fluid medium, including gas and solid components, without the need for additional sensors.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If additional sensors are used to determine qualitative properties of fluid media, then measurement capability is improved, but device complexity and cost increase
Solution Approach 1:
The patent combines multiple sensor chips (first sensor chip for flow parameters, second sensor chip for qualitative composition) into a single integrated sensor device with a common housing and electronics module. This merging approach enables simultaneous measurement of both quantitative flow parameters and qualitative fluid composition without requiring separate standalone sensors, thereby improving measurement capability while managing device complexity through integration.
Solution Approach 2:
The sensor device is designed as a multi-functional system where the first sensor chip measures flow parameters (volume flow rate, mass flow rate) and the second sensor chip measures qualitative composition (gas components, particles). This universal design allows a single device to perform multiple measurement functions that would traditionally require separate specialized sensors, enhancing versatility while consolidating hardware.
2Adaptability or versatility
If additional sensors are used to determine qualitative properties of fluid media, then measurement capability is improved, but cost increases
Solution Approach 1:
The patent combines multiple sensor chips (first sensor chip for flow parameters, second sensor chip for qualitative composition) into a single integrated sensor device with a common housing and electronics module. This merging approach enables simultaneous measurement of both quantitative flow parameters and qualitative fluid composition without requiring separate standalone sensors, thereby improving measurement capability while managing device complexity through integration.
Solution Approach 2:
The sensor device is designed as a multi-functional system where the first sensor chip measures flow parameters (volume flow rate, mass flow rate) and the second sensor chip measures qualitative composition (gas components, particles). This universal design allows a single device to perform multiple measurement functions that would traditionally require separate specialized sensors, enhancing versatility while consolidating hardware.
3Measurement precision
If sensor chip protrudes into measuring channel, then measurement accuracy is improved, but flow resistance increases
Solution Approach 1:
The sensor chip is nested within a sensor carrier that is integrated into the housing structure. The sensor chip with sensor membrane is positioned such that the membrane faces the flow direction and is permeable to the flowing fluid medium, while the carrier provides structural support and electrical connections. This nesting approach allows the sensing element to be exposed to the flow for accurate measurement while minimizing disruption to the overall flow path.
Solution Approach 2:
The sensor chip utilizes a thin sensor membrane that is permeable to the flowing fluid medium. This thin film structure allows the fluid to interact with the sensing elements (heating element and temperature sensors) on the measuring surface while maintaining structural integrity and minimizing flow resistance. The membrane's thinness enables accurate thermal measurements without creating significant flow obstruction.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the simultaneous measurement of fluid medium parameters and qualitative composition, reducing the need for extra sensors and lowering costs while enhancing the sensor's functional capabilities.
Implementation Method 1
The sensor chip generally comprises at least one heating element and at least two temperature sensors, which are arranged, for example, on the measuring surface of the sensor chip
Implementation Method 2
A partial flow of the medium passes through at least one main channel provided in the hot-film air mass meter. An asymmetry in the temperature profile detected by the temperature sensors, which is influenced by the flow of the fluid medium, allows conclusions to be drawn about the mass flow and/or volume flow
Implementation Method 3
The second sensor chip is designed to detect qualitative composition components, in particular gas components and/or solid components
Implementation Method 4
The qualitative composition comprises at least a proportion of a gas component in the fluid medium and/or a proportion of a solid in the fluid medium
Data Source
Figure 1~2
Figure 3
Figure 4~5
AI summary
The invention relates to a sensor (10) for determining at least one parameter of a fluid medium flowing through a measurement channel (30), particularly of an intake air mass flow of an internal combustion engine. The sensor (10) comprises a sensor housing (12), in particular a plug-in sensor which is introduced or can be introduced into a flow tube, in which the measurement channel (30) is formed, at least one first sensor chip (42) arranged in the measurement channel (30) for determining the parameter of the fluid medium, and an electronics module (38). The electronics module (38) comprises a control and/or evaluation circuit (50). The sensor (10) further comprises a second sensor chip (54) for determining a qualitative composition of the fluid medium. The second sensor chip (54) is connected to the control and/or evaluation circuit (50).