Fluid Supply Apparatus Automated Container Handling
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Solution Overview
Problem
Manual handling of heavy containers for process fluids in substrate processing poses risks of injury and damage to operators, and existing systems lack automation for efficient fluid supply and residue retrieval.
Innovation Solution
A fluid supply apparatus with a container supply holder, cap separator, and fluid supplier, including a detachable nozzle cap and rotation actuator, automated to safely handle and supply process fluids, and a residue retrieving air pump for pneumatic pressure to retrieve remaining fluids, integrated with a substrate processing apparatus for automated operation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If manual operations are used to handle containers, then flexibility and simplicity are maintained, but operator safety and injury prevention deteriorate
Solution Approach 1:
The system enables automated self-service handling where the container handling apparatus autonomously performs container transportation, mounting, and nozzle cap separation without human intervention, thereby eliminating operator exposure to heavy container handling risks while maintaining operational simplicity through centralized control
Solution Approach 2:
Manual mechanical handling operations are replaced with an automated container handling apparatus that uses mechanical arms, actuators, and automated separation mechanisms to manipulate containers and their components, substituting human physical operations with controlled mechanical systems that prioritize operator safety
2Object-affected harmful factors
If automated container handling is implemented, then operator safety is improved, but device complexity increases
Solution Approach 1:
The container handling apparatus is designed as a multi-functional integrated system that performs multiple operations including container transportation, mounting onto the fluid supply facility, and automated nozzle cap separation, thereby consolidating several functions into a single apparatus that manages complexity through functional integration
Solution Approach 2:
The automated handling system is divided into distinct functional modules: a container transportation mechanism, a mounting mechanism, and a nozzle cap separation mechanism with cap clamps and rotation actuators. This segmentation allows each module to be independently controlled and maintained, managing overall system complexity through modular design
3Device complexity
If residue fluid is not retrieved, then system simplicity is maintained, but contamination and facility operation rates deteriorate
Solution Approach 1:
The fluid supply system incorporates continuous residue retrieval operation where the air pump continuously or periodically removes residual process fluid from the fluid supply line after main fluid supply concludes, ensuring the system is prepared for the next operation cycle without contamination buildup, thereby maintaining high facility operation rates through continuous fluid management
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus reduces operator risk by automating the handling and supply of process fluids, ensuring safe and efficient operation while minimizing residue contamination and enhancing facility operation rates.
Implementation Method 1
a residue retrieving air pump configured to provide pneumatic pressure to the second fluid passage of the adapter such that the process fluid remaining in the first fluid passage of the adapter is retrieved from the container body
Data Source
AI summary
A fluid supply apparatus includes a container supply holder configured to supply a container to a cap separator using a loading box, the container including a detachable nozzle cap, and configured to store a process fluid, a cap separator configured to receive the container from the loading box and separate the nozzle cap from a container body of the container using a cap clamper and a rotation actuator, the cap clamper configured to clamp and hold the nozzle cap, and the rotation actuator configured to rotate the container body, a fluid supplier configured to supply the process fluid contained in the container body through a fluid supply line, and a controller configured to control the container supply holder, the cap separator, and the fluid supplier.