Nanofabrication Fluid Switching With Bypass Circulation

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Solution Overview

Problem

Existing nanofabrication systems require significant time and material waste when switching between different formable materials in the dispensing process, necessitating multiple filling and draining cycles which increase operational costs.

Innovation Solution

A method and system for fluid switching in a dispensing system that involves stopping the flow of a first fluid, introducing a flush fluid, removing it, and allowing a second fluid to flow through the system while continuously circulating the first fluid to and from a reservoir, thereby minimizing material waste and reducing switching time.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of substance

If conventional fluid switching method (shut down, drain, fill, circulate, repeat) is used, then complete fluid replacement is achieved, but switching time increases and material waste increases

Engineering Contradiction:
Improveformable material wasteVSAvoidfluid switching time
Core Design Contradiction:
Loss of substanceVSLoss of time

Solution Approach 1:

The flow system is divided into a common portion (supply manifold, dispenser, return manifold, supply path, return path) and a bypass portion (reservoir with circulation pump). This segmentation allows the first fluid to be continuously circulated in the bypass while the second fluid is introduced into the common portion, enabling parallel operations that reduce switching time and material waste.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The first fluid is continuously circulated in the bypass loop before the actual switching operation begins. This preliminary circulation prepares the system by keeping the first fluid ready for quick re-introduction while the common portion is being flushed with the second fluid, significantly reducing the total switching time.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 3:

The bypass loop acts as an intermediary system that temporarily holds and circulates the first fluid during the switching process. This intermediary circulation path allows the first fluid to be preserved and reused, preventing material waste while enabling rapid switching when the second fluid is no longer needed.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If multiple filling and draining cycles are performed to switch fluids, then complete fluid replacement is achieved, but operational complexity increases and costs increase

Engineering Contradiction:
Improvefluid replacement completenessVSAvoidswitching process complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The first fluid is continuously circulated in the bypass loop throughout the entire switching process, maintaining its readiness for immediate re-use. This continuous circulation eliminates the need to shut down and restart the fluid delivery system, simplifying the switching process while ensuring complete fluid replacement in the common portion.

Inventive Principle:
Principle #20Continuity of useful action

Solution Approach 2:

Different parts of the system perform different functions during switching: the bypass loop continuously circulates and preserves the first fluid, while the common portion receives and flushes the second fluid. This local differentiation of functions allows simultaneous operations that simplify the overall process while ensuring complete fluid replacement where needed.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach significantly reduces the time and material waste associated with fluid switching, enhancing the efficiency and cost-effectiveness of nanofabrication processes.

Implementation Method 1

continuously circulating the first fluid to and from a reservoir without the first liquid entering the common portion of the flow system

Methodology Applied
Scientific EffectFluid circulation:

Implementation Method 2

causing a flush fluid to flow through the common portion of the flow system

Methodology Applied
Scientific EffectFluid flow:

Implementation Method 3

causing the second fluid to flow through the common portion of the flow system

Methodology Applied
Scientific EffectFluid flow:

Data Source

PatentUS12409466B2Method and system for switching a dispensed fluid in a nanofabrication dispensing system
Publication Date: 2025.09.09 CANON KK
  • US12409466B2 patent drawing
  • US12409466B2 patent drawing
  • US12409466B2 patent drawing

AI summary

A method of switching a first fluid supplied to a dispenser with a second fluid. The method includes stopping the first fluid from flowing into a common portion of a flow system, causing a flush fluid to flow through the common portion, stopping the flush fluid from flowing into the common portion, removing the flush fluid from the common portion, causing the second fluid to flow through the common portion, and continuously circulating the first fluid to and from a reservoir without the first liquid entering the common portion of the flow system. The continuously circulating of the first fluid begins a) after stopping the fluid liquid from flowing into the common portion of the flow system and b) prior to or during the second fluid flowing through the common portion of the flow system.