Fluid Temperature Control Using Thermoelectric Modules

Solution Overview

Problem

The existing temperature control systems in semiconductor manufacturing devices face challenges in achieving high accuracy due to control delays in variable valve systems, which affect the precise control of fluid temperatures.

Innovation Solution

A temperature control system comprising a circulation channel with a tank containing fluid at a specified temperature range and a first temperature controller between the tank and the temperature control target, using a thermoelectric module to adjust the fluid temperature, eliminating the need for variable valve control.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a variable valve is used to adjust fluid temperature, then the temperature control system can regulate flow, but control delays occur leading to poor temperature accuracy

Engineering Contradiction:

Improvetemperature control accuracyVSAvoidcontrol delay

Core Design Contradiction:

Measurement precisionVSLoss of time

Solution Approach 1:

The patent replaces the mechanical variable valve control system with a thermoelectric module (solid-state cooling device) that directly adjusts fluid temperature. This substitution eliminates the control delays inherent in mechanical valve systems by using solid-state Peltier effect-based temperature control, achieving faster and more accurate temperature regulation without relying on flow rate modulation.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The invention changes the control parameter from flow rate (valve opening degree) to direct temperature adjustment using a thermoelectric module. By controlling the current through the thermoelectric module rather than the valve opening, the system achieves more precise and responsive temperature control, eliminating the lag between valve actuation and actual temperature change.

Inventive Principle:

Principle #35Parameter changes

2Manufacturing precision

If variable valve control is used, then the system structure is simpler, but high accuracy temperature control cannot be achieved

Engineering Contradiction:

Improvetemperature control precisionVSAvoidcontrol system complexity

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent replaces the mechanical variable valve control system with a thermoelectric module (solid-state cooling device) that directly adjusts fluid temperature. This substitution eliminates the control delays inherent in mechanical valve systems by using solid-state Peltier effect-based temperature control, achieving faster and more accurate temperature regulation without relying on flow rate modulation.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enables high-accuracy temperature control of the fluid, improving precision and reliability in semiconductor manufacturing processes by directly adjusting the fluid temperature without relying on variable valve control.

Implementation Method 1

using a thermoelectric module to adjust the fluid temperature

Methodology Applied

Scientific EffectThermoelectric effect: Peltier Effect

Data Source

PatentUS11797033B2Temperature control system and temperature control method

Publication Date: 2023.10.24 KELK LTD

AI summary

To control the temperature of a fluid with high accuracy, a temperature control system is equipped with: a circulation channel including a temperature control target and a tank containing a fluid adjusted to a specified temperature range including a target temperature of the temperature control target; and a first temperature controller that is arranged between the tank and the temperature control target in the circulation channel and that adjusts the temperature of the fluid to be supplied to the temperature control target.