Integrated Fluidic Device Base with Parallel Circulation Lines
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Solution Overview
Problem
Conventional fluidic device configurations, such as those used in semiconductor manufacturing, face challenges in reducing footprint due to linear connections and separate manifold bases, which limit size reduction and increase footprint, especially when branch pipes are connected using headers.
Innovation Solution
A fluidic device unit structure where fluidic devices are integrated on a base member with parallel fluid circulation lines and connecting channels, reducing the footprint by eliminating the need for separate manifold bases and minimizing dynamic pressure on valve members.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If branch pipes are connected using headers in conventional structure, then fluid distribution is achieved, but the device footprint is increased and size reduction is limited
Solution Approach 1:
The patent merges the header structure and base structure into a single integrated base member. The base member includes both the mounting surfaces for fluidic devices and the fluid circulation lines that function as integrated headers, eliminating the need for separate header components and reducing overall footprint.
Solution Approach 2:
The patent transitions from conventional linear/planar pipe connections to three-dimensional fluid circulation lines embedded within the base member structure. This allows fluid distribution in multiple directions and planes simultaneously, reducing the footprint while maintaining distribution functionality.
2Area of stationary object
If chemical solution fluidic devices are connected using separate manifold base, then connection is achieved, but the footprint is increased
Solution Approach 1:
The patent combines the manifold base functionality directly into the base member structure. The base member simultaneously serves as the mounting platform for fluidic devices and as the fluid distribution network, eliminating separate manifold components while maintaining ease of connection through standardized mounting surfaces.
3Reliability
If fluidic devices are connected in parallel using conventional headers, then fluid distribution is achieved, but dynamic pressure directly acts on valve members
Solution Approach 1:
The patent introduces communication channels as intermediary pathways between the fluid circulation lines and fluidic devices. These channels act as buffer zones that decouple the high-pressure fluid circulation lines from the valve members, preventing direct transmission of dynamic pressure while maintaining fluid distribution functionality.
4Area of stationary object
If inline type connection is used, then device integration is achieved, but the entire length in straight line becomes large
Solution Approach 1:
The patent employs three-dimensional fluid circulation lines embedded within the base member to replace conventional linear inline connections. This allows fluid to travel through multiple dimensions (vertical and horizontal pathways) rather than strictly linear paths, reducing the overall straight-line length while maintaining connection functionality.
Data Source
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AI summary
A fluidic device unit structure in which a plurality of fluidic devices are integrated and which is effective in reducing a footprint is provided. With a fluidic device unit structure in which a plurality of fluidic devices that are connected by channels are integrated in a base member 10 in parallel, the base member 10, which has a plurality of mounting surfaces 11 on which pure-water opening and closing valves 5 are mounted, includes a pure-water circulation supply line 2 that passes through the base member 10 and that is connected in parallel to the pure-water opening and closing valves 5 via pure-water branch channels 4.