Fluidic Device Relay for Diagnostic Data Transmission
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Solution Overview
Problem
The reduction in size of fluidic devices for semiconductor manufacturing processes has made it impossible to include a port for cable connection to diagnostic apparatuses, preventing the transmission of necessary data for diagnosing operation states.
Innovation Solution
A relay system with multiple ports is introduced, connecting fluidic devices to user information processors and diagnostic apparatuses, allowing for data transmission without cable connections, and including identifier assignment and display parts to facilitate flexible diagnosis and reduce device size.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If the size of fluidic device is reduced, then the device size is decreased, but the ability to include a port for cable connection to diagnostic apparatus is lost
Solution Approach 1:
A relay device is introduced as an intermediary between the fluidic device and diagnostic apparatus. The relay includes a first port connected to the fluidic device and a third port connected to the diagnostic apparatus, enabling diagnostic data transmission without requiring a cable connection port on the reduced-size fluidic device itself.
Solution Approach 2:
The system is segmented into distinct functional components: the fluidic device for process control, the relay for data communication and diagnostics, and the diagnostic apparatus for analysis. This segmentation allows the fluidic device to be minimized while diagnostic functionality is maintained through the separate relay component.
2Ease of operation
If a cable connection port is provided for diagnostic apparatus connection, then diagnostic capability is enabled, but the device size increases
Solution Approach 1:
The relay acts as a mediator that consolidates the diagnostic communication function externally. By placing the diagnostic port on the relay rather than the fluidic device, the fluidic device size is reduced while diagnostic capability is preserved through the relay's third port.
3Adaptability or versatility
If multiple communication lines are used for fluid-related data and diagnostic data, then diagnostic data transmission is enabled without blocking user communication, but the system complexity increases
Solution Approach 1:
Communication is segmented into separate channels: a first communication line for fluid-related control data and a second communication line for diagnostic data. This segmentation allows both types of data to be transmitted simultaneously without interference, maintaining communication flexibility while managing complexity through clear functional separation.
Solution Approach 2:
The relay is designed with multi-functionality, handling both fluid control communication and diagnostic data transmission through a single device. This consolidates multiple communication functions into one component, reducing overall system complexity despite using multiple communication lines.
Data Source
AI summary
In order to make it possible to diagnose an operation state of a fluidic device despite reducing the size of the fluidic device, a relay is configured to include a first port connected with the fluidic device and a second port connected with a user information processor, and receive fluid-related data from the fluidic device via the first port and transmit the data to the user information processor via the second port, or receive the data from the user information processor via the second port and transmit the data to the fluidic device via the first port. In addition, the relay includes a third port that is connected with a diagnostic apparatus adapted to diagnose the operation state of the fluidic device, receive diagnostic data from the fluidic device via the first port, and transmit the diagnostic data to the diagnostic apparatus via the third port.