Fluidized Bed Gas Treatment for Continuous Catalyst Exchange
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Solution Overview
Problem
Current gas treatment systems in semiconductor processes face challenges in continuous operation due to catalyst degradation, inefficiency in treating various gases, and temperature management, which affects the effectiveness of gas treatment and equipment performance.
Innovation Solution
A gas treatment system comprising a first scrubber, a fluidized bed catalytic reactor, and a second scrubber, connected through blowers, with a combustion apparatus for burning gases from different process chambers, allowing for catalyst exchange during operation, efficient treatment of diverse gases, and temperature adjustment using a pre-heater and combustion chamber.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional catalytic reactor is used for gas treatment, then the treatment process can be performed, but the catalyst degrades over time requiring equipment shutdown for replacement
Solution Approach 1:
The catalytic reactor is divided into multiple catalyst containers (first catalyst container, second catalyst container) that can be independently replaced. This segmentation allows one catalyst container to be replaced while another continues to function, enabling continuous gas treatment without complete shutdown.
Solution Approach 2:
A standby catalyst container is prepared in advance with fresh catalyst material. When the active catalyst degrades, the standby container is pre-positioned and ready for immediate replacement, minimizing downtime. The system maintains operational readiness by having replacement catalyst prepared before it is needed.
2Productivity
If a single scrubber and catalytic reactor are used, then the system structure remains simple, but the efficiency of treating various exhausted gases is insufficient
Solution Approach 1:
The gas treatment system is designed with multiple scrubbers and catalytic reactors that can handle different types of exhausted gases from various process chambers. Each component is configured to treat specific gas compositions, allowing the system to universally process diverse semiconductor manufacturing exhaust gases through selective treatment paths.
Solution Approach 2:
The treatment system is segmented into multiple independent scrubber and reactor units that can operate in parallel or series configurations. This segmentation allows efficient treatment of different gas streams simultaneously while maintaining manageable system complexity through modular design.
3Reliability
If catalyst exchange is not performed during operation, then the equipment structure remains simpler, but continuous operation cannot be achieved
Solution Approach 1:
The catalyst system is segmented into multiple replaceable containers within the reactor. This allows individual catalyst containers to be exchanged without affecting the entire reactor system, enabling continuous operation with reduced complexity compared to complete system shutdown and replacement.
Solution Approach 2:
A standby catalyst container serves as an intermediary element that bridges the gap between catalyst degradation and replacement. The standby container allows seamless transition from depleted to fresh catalyst without requiring system shutdown, maintaining continuous operation with minimal structural complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables continuous gas treatment operations by exchanging catalysts, increases treatment efficiency, and effectively manages gas temperatures, ensuring consistent performance and extended equipment lifespan.
Implementation Method 1
a catalytic reactor connected to the first scrubber and configured to treat a gas passing through the first scrubber, and wherein the catalytic reactor may include a fluidized bed reactor (FBR)
Implementation Method 2
a combustion apparatus connected to the second process chamber and configured to burn a gas exhausted from the second process chamber
Implementation Method 3
temperature adjustment using a pre-heater and combustion chamber
Data Source
AI summary
A gas treatment system includes a first scrubber configured to treat a gas exhausted from a process chamber, a catalytic reactor connected to the first scrubber and configured to treat a gas passing through the first scrubber, and a second scrubber connected to the catalytic reactor and configured to treat a gas passing through the catalytic reactor, where the catalytic reactor includes a fluidized bed reactor (FBR).