Fluidized Bed Nozzle Design for Trichlorosilane Corrosion Control

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Solution Overview

Problem

Conventional fluidized-bed reaction vessels for trichlorosilane production experience corrosion and wear of the inner wall due to hydrogen chloride gas ejection radially, which affects the efficiency and longevity of the reaction container.

Innovation Solution

The design incorporates a fluidized-bed reaction vessel with ejection nozzles arranged such that hydrogen chloride gas is ejected inwardly and radially, preventing direct contact with the outer wall, and features a double-pipe structure for the nozzles to prevent clogging by metallurgical grade silicon powder, with gas ejection openings positioned to avoid accumulation of impurities.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If hydrogen chloride gas ejection members are arranged to eject gas radially in all directions, then gas distribution efficiency is improved, but corrosion and wear of the container inner wall increases

Engineering Contradiction:
Improvegas distribution efficiencyVSAvoidcorrosion and wear of container inner wall
Core Design Contradiction:
ProductivityVSObject-affected harmful factors

Solution Approach 1:

The ejection nozzles are designed with asymmetric gas ejection opening arrangements where nozzles near the outer wall have fewer or no gas ejection openings facing the wall, while central nozzles maintain full radial ejection capability. This local differentiation allows efficient gas distribution in the reaction zone while protecting the container wall from corrosive gas impact.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The ejection nozzles act as intermediaries that redirect the gas flow path. By positioning gas ejection openings to face away from the outer wall, the nozzles mediate between the need for radial gas distribution and the need to protect the container wall, directing gas flow into the reaction zone without wall contact.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Device complexity

If ejection nozzles are positioned close to the outer wall for compact design, then device complexity is reduced, but nozzle clogging by silicon powder increases

Engineering Contradiction:
Improvenozzle arrangement simplicityVSAvoidnozzle clogging resistance
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

Different nozzle positions are designed with different gas ejection opening configurations. Nozzles near the outer wall have reduced or eliminated wall-facing openings to prevent clogging, while maintaining other ejection directions for functionality. This local adaptation resolves the conflict between compact positioning and clogging resistance.

Inventive Principle:
Principle #3Local quality

3Productivity

If gas ejection openings face all directions for uniform gas distribution, then reaction efficiency is improved, but impurity accumulation on the outer wall increases

Engineering Contradiction:
Improvereaction efficiencyVSAvoidimpurity accumulation on outer wall
Core Design Contradiction:
ProductivityVSLoss of substance

Solution Approach 1:

The gas ejection openings are selectively positioned and oriented based on location. Nozzles adjacent to the outer wall have gas ejection openings that face away from the wall, preventing impurity accumulation in that specific zone, while other nozzles maintain omnidirectional ejection for optimal reaction efficiency in the bulk fluidized bed.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration reduces corrosion and wear of the reaction container's inner wall, enhances the efficiency of the reaction between silicon powder and hydrogen chloride gas, and maintains the vessel's integrity by preventing nozzle clogging and impurity accumulation.

Implementation Method 1

configured to cause metallurgical grade silicon powder and hydrogen chloride gas to react with each other for production of trichlorosilane

Methodology Applied
Scientific EffectFluidization: Fluidisation

Data Source

PatentEP3715330B1Fluidized bed reaction container and method for producing trichlorosilane
Publication Date: 2024.08.28 TOKUYAMA CORP
  • EP3715330B1 patent drawingFigure 1(a)~1(c)
  • EP3715330B1 patent drawingFigure 2
  • EP3715330B1 patent drawingFigure 3(a)~3(b)

AI summary

To provide a fluidized-bed reaction vessel and a trichlorosilane production method each of which can reduce corrosion and wear of a reaction container inner wall, a fluidized-bed reaction vessel causes metallurgical grade silicon powder and hydrogen chloride gas to react with each other for production of trichlorosilane. The fluidized-bed reaction vessel includes a plurality of ejection nozzles (20) standing on a distributor plate (11) as a bottom surface of a container body. The ejection nozzles (20) each have a gas ejection opening (22a) configured to allow hydrogen chloride gas to be ejected sideways. The plurality of ejection nozzles (20) include a first ejection nozzle (20a) adjacent to an outer wall (10a) of the container body, the first ejection nozzle (20a) having a gas ejection opening (22a) in such a pattern as to prevent hydrogen chloride gas from being ejected toward the outer wall (10a).