X-Ray Fluorescence Analyzer for Depth Analysis at Variable Angles
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Solution Overview
Problem
Conventional X-ray fluorescence analyzers struggle to determine the layer structure and constituent elements in the depth direction of a specimen, particularly when measuring film thickness of plated layers, as they cannot differentiate between peaks of elements in the plated layer and the matrix.
Innovation Solution
An X-ray fluorescence analyzer that acquires multiple X-ray spectra at varying take-off angles to analyze the depth direction of a specimen by utilizing the ratio of X-ray intensity change to take-off angle change, allowing differentiation of elements in different layers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional X-ray fluorescence analyzers use a single take-off angle for measurement, then the measurement process is simple and fast, but the ability to determine element depth distribution and layer structure is lost
Solution Approach 1:
The patent applies the dynamics principle by making the take-off angle variable rather than fixed. The measurement system dynamically adjusts the take-off angle to multiple different values during the measurement process, enabling depth distribution analysis through angle-dependent intensity variations while maintaining a relatively simple overall device structure
Solution Approach 2:
The patent implements parameter changes by varying the take-off angle parameter during measurement. By acquiring spectra at different take-off angles and analyzing the intensity ratio changes, the system can determine element depth distribution and layer structure without requiring complex additional hardware
2Loss of information
If conventional X-ray fluorescence analyzers measure only total element content, then the analysis is straightforward, but information on layer structure and depth distribution is unavailable
Solution Approach 1:
The patent applies segmentation by dividing the measurement process into multiple discrete take-off angle measurements. Each angle provides a different weighting of signals from different depths, and by segmenting the analysis into comparing intensity ratios at different angles, the system can differentiate between elements in plated layers versus the matrix
Solution Approach 2:
The patent introduces another dimension by adding the take-off angle as a variable parameter. This transforms the measurement from a single integrated value into a multi-dimensional dataset where intensity variations with angle provide information about depth distribution, enabling recovery of depth information that would otherwise be lost
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate determination of element presence and concentration in specific layers of a specimen, providing information on layer order and composition.
Implementation Method 1
an X-ray tube that generates a primary X-ray
Implementation Method 2
a secondary X-ray which the specimen emits when irradiated with a primary X-ray
Implementation Method 3
detecting, with a detector, a secondary X-ray
Data Source
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AI summary
An analysis method using an X-ray fluorescence analyzer (100) is provided in which an X-ray spectrum is acquired by detecting a secondary X-ray emitted from a specimen (S) when the specimen (S) is irradiated with a primary X-ray. The analysis method includes: acquiring a first X-ray spectrum obtained, with a take-off angle of the secondary X-ray being set as a first take-off angle; acquiring a second X-ray spectrum obtained, with a take-off angle of the secondary X-ray being set as a second take-off angle that is different from the first take-off angle; and obtaining information on an element in a depth direction of a specimen (S) based on the first X-ray spectrum and the second X-ray spectrum.