Fluorescence Analysis for Washing Tool Cleaning Degree

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing methods for confirming the washing degree of washing tools, such as PVA brushes, used in substrate washing are complex and environmentally burdensome, requiring iodine solutions and starch-decomposing enzymes.

Innovation Solution

A cleaning method and apparatus that uses fluorescence spectroscopic analysis to determine the washing degree of PVA brushes by measuring the fluorescence intensity of the eluate at specific wavelengths, indicating the presence of starch and PVA.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If iodine solution and starch-decomposing enzyme are used to detect washing degree, then detection accuracy is improved, but device complexity and environmental burden increase

Engineering Contradiction:
Improvewashing degree detection accuracyVSAvoiddetection process complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent extracts only the necessary detection capability by using fluorescence spectroscopic analysis that directly measures washing degree through fluorescence intensity of the eluate itself, without extracting or adding any chemical reagents like iodine solution or enzymes. The detection is performed on the washed liquid directly, simplifying the detection process while maintaining accuracy.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent replaces the chemical-based detection system (iodine solution and enzymes) with a physical detection method (fluorescence spectroscopy). The fluorescence intensity measurement at specific wavelengths provides accurate washing degree detection without requiring any chemical reagents, thereby reducing device complexity and environmental burden.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Measurement precision

If iodine solution and starch-decomposing enzyme are used for washing degree confirmation, then measurement precision is improved, but loss of substance increases due to waste liquid disposal

Engineering Contradiction:
Improvewashing degree detection accuracyVSAvoidwaste liquid disposal
Core Design Contradiction:
Measurement precisionVSLoss of substance

Solution Approach 1:

The patent eliminates the need for additional chemical substances by using fluorescence spectroscopic analysis on the washing liquid itself. The method detects washing degree through the intrinsic fluorescence properties of the eluate at specific wavelengths (290-300 nm and 330-350 nm), requiring no external reagents and generating no chemical waste.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent substitutes chemical consumption-based detection with a physical measurement approach. Fluorescence spectroscopy measures the washing degree by detecting the fluorescence intensity of the eluate, replacing the consumable chemical reagents (iodine solution and enzymes) with a non-consumptive optical measurement method.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Ease of operation

If simple visual inspection is used for washing degree confirmation, then ease of operation is improved, but measurement precision deteriorates

Engineering Contradiction:
Improvedetection operation simplicityVSAvoidwashing degree detection accuracy
Core Design Contradiction:
Ease of operationVSMeasurement precision

Solution Approach 1:

The patent replaces subjective visual inspection with objective fluorescence spectroscopic measurement. The system automatically measures the fluorescence intensity of the eluate at specific wavelengths and compares it against predetermined thresholds, providing accurate and repeatable washing degree assessment while maintaining operational simplicity through automated control.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent implements a feedback mechanism where the fluorescence intensity measurement results are automatically compared against predetermined threshold values. The system provides clear pass/fail determination based on whether the measured intensity falls below the threshold, enabling simple operational decision-making while ensuring precise measurement through automated feedback control.

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method allows for a simple and environmentally friendly confirmation of the washing degree of washing tools, reducing the need for hazardous chemicals and minimizing environmental impact.

Implementation Method 1

performances fluorescence analysis on the washing liquid extracted by the liquid extraction part and measures a fluorescence intensity of the washing liquid for an excitation light of a predetermined wavelength

Methodology Applied
Scientific EffectFluorescence: Fluorescence

Data Source

PatentUS20250076200A1Cleaning method and apparatus for washing tool, substrate washing apparatus and manufacturing method for washing tool
Publication Date: 2025.03.06 EBARA CORP
  • US20250076200A1 patent drawing
  • US20250076200A1 patent drawing
  • US20250076200A1 patent drawing

AI summary

A cleaning apparatus for performs a cleaning process on a washing tool for substrate washing by supplying a washing liquid to the washing tool and bringing the washing tool into contact with a cleaning member. The cleaning apparatus includes: a liquid extraction part that extracts a washing liquid remaining inside the washing tool or a washing liquid flowing out from the washing tool during the cleaning process; a fluorescence analysis part that performs fluorescence analysis on the washing liquid extracted by the liquid extraction part and measures a fluorescence intensity of the washing liquid for an excitation light of a predetermined wavelength; and a judgement part that judges, based on the measured fluorescence intensity, whether or not the cleaning of the washing tool has been completed.