Fluorescent Chemical Sensor Waveguide Integration

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Solution Overview

Problem

Existing fluorescence-based gas sensors face challenges in achieving high sensitivity due to the low conversion rate of exciting light to fluorescence, requiring a close proximity between the photodetector and sensing material while minimizing exposure to exciting light.

Innovation Solution

A CMOS-compatible chemical sensing device is developed, incorporating a semiconductor substrate with integrated circuit components, a photodetector, and a waveguide structure that couples electromagnetic radiation into and out of the sensing area, using gratings, scattering particles, or mirrors to direct radiation and an optical filter to block exciting light, allowing for a compact design and enhanced fluorescence detection.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If the photodetector is placed close to the sensing material to maximize fluorescence detection, then the sensitivity is improved, but the photodetector is exposed to excessive exciting light which reduces measurement accuracy

Engineering Contradiction:
Improvefluorescence detection sensitivityVSAvoidexciting light exposure to photodetector
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The waveguide acts as an intermediary structure that selectively guides fluorescence photons from the sensing material to the photodetector while blocking the excitation light path. The waveguide's optical properties allow it to transmit specific wavelengths (fluorescence) while reflecting or absorbing others (excitation light), thus mediating between the light source, sensing material, and photodetector to resolve the contradiction between close proximity and light exposure.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The optical filter is positioned specifically between the waveguide and photodetector to provide localized wavelength selection. This local quality enhancement allows the system to maintain close geometric arrangement for high sensitivity while the filter locally removes harmful excitation light wavelengths before they reach the photodetector, ensuring measurement accuracy.

Inventive Principle:
Principle #3Local quality

2Measurement precision

If the distance between photodetector and sensing material is reduced to increase signal strength, then the fluorescence detection capability is improved, but the device complexity increases due to light path management requirements

Engineering Contradiction:
Improvefluorescence signal strengthVSAvoidlight path management structure
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The waveguide integrates multiple functions into a single structure: it serves as both the optical transmission medium for fluorescence and the structural element that defines the compact light path. By merging the light guiding function with the spatial arrangement, the system achieves close photodetector-sensing material positioning without requiring complex external light path management components.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The waveguide structure performs multiple roles simultaneously: it guides fluorescence photons to the photodetector, blocks excitation light through its optical filtering properties, and provides structural support for the compact arrangement. This multi-functionality reduces the need for separate components, thereby reducing device complexity while maintaining high measurement precision.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Device complexity

If a conventional sensor layout is used with light source between sensing material and photodetector, then the device structure is simpler, but the distance between photodetector and sensing material increases reducing sensitivity

Engineering Contradiction:
Improvesensor layout structureVSAvoidfluorescence detection sensitivity
Core Design Contradiction:
Device complexityVSMeasurement precision

Solution Approach 1:

Instead of placing the light source between the sensing material and photodetector as in conventional designs, the invention inverts the arrangement by positioning the photodetector adjacent to the sensing material with the light source positioned elsewhere. The waveguide then guides fluorescence laterally to the photodetector, inverting the traditional linear light path into a lateral guidance configuration that achieves both simplicity and high sensitivity.

Inventive Principle:
Principle #13The other way round (Inversion)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration significantly reduces the sensor size, increases detected fluorescence, and minimizes exciting light exposure to the photodetector, thereby enhancing sensitivity and efficiency.

Implementation Method 1

A waveguide is arranged in or above the dielectric. A portion of the waveguide is arranged at the source of electromagnetic radiation, so that the electromagnetic radiation emitted by the source of electromagnetic radiation is coupled into the waveguide.

Methodology Applied
Scientific EffectTotal internal reflection: Total Internal Reflection

Implementation Method 2

Gas detection by some types of opto-chemical gas sensors is based on a measurement of the fluorescence of a sensing material that changes its optical properties upon exposure to specific gases.

Methodology Applied
Scientific EffectPhotoluminescence: Photoluminescence

Implementation Method 3

an optical filter to block exciting light

Methodology Applied
Scientific EffectOptical absorption: Absorption (EM radiation)

Data Source

PatentEP3492909B1Chemical sensing device using fluorescent sensing material
Publication Date: 2023.11.01 AUSTRIAMICROSYSTEMS AG
  • EP3492909B1 patent drawingFigure 1~2
  • EP3492909B1 patent drawingFigure 3~4
  • EP3492909B1 patent drawingFigure 5

AI summary

The chemical sensing device comprises a substrate (1) of semiconductor material, integrated circuit components (2) and a photodetector (3) formed in the substrate (1), a dielectric (4) on the substrate (1), a wiring (5) in the dielectric, and a source of electromagnetic radiation (6), a waveguide (9) and a fluorescent sensor layer (14) arranged in or above the dielectric. A portion of the waveguide is arranged to allow the electromagnetic radiation emitted by the source of electromagnetic radiation to be coupled into the waveguide. A further portion of the waveguide is arranged between the photodetector and the fluorescent sensor layer.