Fluoride Tunnel Barrier in Magnetoresistive Elements for High PMA

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Solution Overview

Problem

Current magnetoresistive elements face challenges in achieving high perpendicular magnetic anisotropy and high Tunnel MagnetoResistance (TMR) ratio, which are crucial for advanced magnetic memory and sensor applications, particularly in securing large-capacity magnetic memory and wide magnetic field detection.

Innovation Solution

Incorporating a fluoride insulator into the nonmagnetic layer of the magnetoresistive element, which enhances perpendicular magnetic anisotropy and maintains a high TMR ratio by optimizing the interface between magnetic and nonmagnetic layers.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a cobalt iron (CoFe) alloy is used for the magnetic layer and magnesium oxide (MgO) for the nonmagnetic layer, then the TMR effect is achieved, but perpendicular magnetic anisotropy suitable for ultra-Gbit class large-capacity magnetic memory cannot be secured

Engineering Contradiction:
Improveperpendicular magnetic anisotropyVSAvoidmaterial option limitation
Core Design Contradiction:
ReliabilityVSAdaptability or versatility

Solution Approach 1:

The patent uses a composite structure consisting of a CoFeB magnetic layer combined with a MgAlO3 nonmagnetic layer. This composite material approach allows achieving both high perpendicular magnetic anisotropy and high TMR ratio, overcoming the limitations of conventional CoFe/MgO structures. The specific combination of CoFeB (0.8 nm thick) and MgAlO3 (0.3 nm thick) creates synergistic effects that enable ultra-Gbit class magnetic memory performance.

Inventive Principle:
Principle #40Composite materials

2Reliability

If the film thickness of the nonmagnetic thin film is reduced to several nm to achieve TMR effect, then tunnel current flows and magnetization detection is enabled, but perpendicular magnetic anisotropy becomes difficult to maintain

Engineering Contradiction:
ImproveTMR effectVSAvoidperpendicular magnetic anisotropy stability
Core Design Contradiction:
ReliabilityVSStability of the object's composition

Solution Approach 1:

The patent optimizes the thickness parameters of both the magnetic layer and nonmagnetic layer to achieve the desired performance. Specifically, the CoFeB layer is set at 0.8 nm and the MgAlO3 layer at 0.3 nm. These precise parameter adjustments enable the system to maintain perpendicular magnetic anisotropy while preserving the TMR effect, allowing the thin film structure to function effectively for magnetization detection.

Inventive Principle:
Principle #35Parameter changes

3Measurement precision

If a perpendicular magnetization film is used for the magnetic field detection layer to enable wide magnetic field region detection, then detection capability is improved, but large perpendicular magnetic anisotropy must be secured which is difficult with conventional materials

Engineering Contradiction:
Improvemagnetic field detection capabilityVSAvoidperpendicular magnetic anisotropy magnitude
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The patent employs a composite structure of CoFeB magnetic layer and MgAlO3 nonmagnetic layer to achieve both wide magnetic field detection capability and large perpendicular magnetic anisotropy. The CoFeB material provides high magnetization saturation and the MgAlO3 layer contributes to strong perpendicular magnetic anisotropy through interface effects, enabling the detection layer to respond to a wide range of magnetic field intensities while maintaining stable perpendicular magnetization orientation.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution provides high thermal stability and improved magnetic field detection capabilities, reducing operation errors and increasing the operational margin for magnetic devices.

Implementation Method 1

Incorporating a fluoride insulator into the nonmagnetic layer of the magnetoresistive element, which enhances perpendicular magnetic anisotropy

Methodology Applied
Scientific EffectPerpendicular magnetic anisotropy: Anisotropy

Implementation Method 2

magnitude of the tunnel current depends on a relative angle of magnetization of the two magnetic layers. This is called a tunnel magneto resistance (TMR) effect

Methodology Applied
Scientific EffectTunnel magneto resistance (TMR) effect: Magnetoresistance

Data Source

PatentUS20240298548A1Magnetoresistive element, magnetic sensor, and magnetic memory
Publication Date: 2024.09.05 SONY SEMICON SOLUTIONS CORP
  • US20240298548A1 patent drawing
  • US20240298548A1 patent drawing
  • US20240298548A1 patent drawing

AI summary

A magnetoresistive element according to the present embodiment includes a first magnetic layer (11) stacked on a base layer (10), a second magnetic layer (13), and a first nonmagnetic layer (12) arranged between the first magnetic layer (11) and the second magnetic layer (13). The first nonmagnetic layer (12) includes an insulating material including fluorine.