Fluorinated Aluminum Coating for Plasma-Exposed Process Components
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Solution Overview
Problem
High-temperature plasma processes used in semiconductor substrate processing cause accelerated wear and corrosion to apparatus components, particularly due to the corrosive nature of halogen-based plasmas, leading to frequent maintenance and replacement needs.
Innovation Solution
A fluorinated aluminum coating is applied to apparatus components, formed by contacting a metallic aluminum layer with a fluorinating agent, which enhances corrosion resistance and temperature durability by creating a strong, high-melting-point aluminum fluoride layer.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If high-temperature plasma processes are used for substrate processing, then processing capability is improved, but component wear and corrosion accelerate
Solution Approach 1:
The patent applies a composite coating structure consisting of multiple layers: a nickel underlayer, an intermediate aluminum layer, and an outer aluminum fluoride layer. This composite structure combines the advantages of each material - nickel provides base corrosion resistance and adhesion, aluminum offers high-temperature stability, and aluminum fluoride provides superior resistance to chlorine and fluorine plasma corrosion, thereby protecting components during high-temperature plasma processing
Solution Approach 2:
The patent utilizes parameter changes by controlling the fluorination process conditions (temperature, fluorine exposure time and concentration) to transform the aluminum intermediate layer into aluminum fluoride. This chemical transformation changes the material properties from metallic aluminum to ceramic aluminum fluoride, which has significantly improved resistance to plasma corrosion while maintaining thermal stability
2Ease of manufacture
If traditional coatings are used on apparatus components, then manufacturing simplicity is maintained, but resistance to chlorine and fluorine attack is insufficient
Solution Approach 1:
The patent applies preliminary action by first depositing a nickel underlayer and aluminum intermediate layer before the final fluorination step. This preliminary coating structure is then fluorinated in advance to form the protective aluminum fluoride layer, so that when the component is used in plasma processing, the corrosion-resistant coating is already in place, eliminating the need for frequent maintenance
Solution Approach 2:
The patent converts the harmful corrosive environment (chlorine and fluorine plasma) into a beneficial manufacturing step by using fluorine gas to transform the aluminum intermediate layer into aluminum fluoride coating. The same fluorine that would normally corrode the component is instead used to create a corrosion-resistant protective layer
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The fluorinated aluminum coating significantly improves the resistance of apparatus components to chlorine and fluorine attacks, reducing wear and corrosion, thus extending the lifespan and reducing maintenance requirements of the components.
Implementation Method 1
contacting the metallic aluminum with a fluorinating agent under conditions sufficient to form a fluorinated aluminum coating
Data Source
AI summary
A component of an apparatus for processing a substrate having a coating comprising fluorinated aluminum disposed on at least a portion of a surface of the component. A method of coating the component, a method of repairing a coating on a component, and a method of processing a substrate are also disclosed.